5/11/2011	10:01:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	10:01:34 AM	Recipe started at 10:01 AM
5/11/2011	10:01:34 AM	Helium valve closed
5/11/2011	10:01:34 AM	H2 valve closed
5/11/2011	10:01:34 AM	BCl3 valve closed
5/11/2011	10:01:34 AM	PH3 valve closed
5/11/2011	10:01:34 AM	SiCl4 pre valve closed
5/11/2011	10:01:34 AM	SiCl4 post valve closed
5/11/2011	10:01:34 AM	Main Vac valve closed
5/11/2011	10:01:34 AM	Bubbler valve closed
5/11/2011	10:01:34 AM	Bypass valve opened
5/11/2011	10:01:34 AM	Helium MFC set to  0.000000
5/11/2011	10:01:34 AM	H2 MFC set to  0.000000
5/11/2011	10:01:34 AM	BCl3 MFC set to  0.000000
5/11/2011	10:01:34 AM	PHl3 MFC set to  0.000000
5/11/2011	10:01:34 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:01:34 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:01:34 AM	Tube furnace set to 0
5/11/2011	10:01:34 AM	Run aborted at 10:01 AM
5/11/2011	10:01:34 AM	Helium valve closed
5/11/2011	10:01:34 AM	H2 valve closed
5/11/2011	10:01:34 AM	BCl3 valve closed
5/11/2011	10:01:34 AM	PH3 valve closed
5/11/2011	10:01:34 AM	SiCl4 pre valve closed
5/11/2011	10:01:34 AM	SiCl4 post valve closed
5/11/2011	10:01:34 AM	Bypass valve closed
5/11/2011	10:01:34 AM	Main Vac valve closed
5/11/2011	10:01:34 AM	Bubbler valve closed
5/11/2011	10:01:34 AM	Helium MFC set to  0.000000
5/11/2011	10:01:34 AM	H2 MFC set to  0.000000
5/11/2011	10:01:34 AM	BCl3 MFC set to  0.000000
5/11/2011	10:01:34 AM	PHl3 MFC set to  0.000000
5/11/2011	10:01:34 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:01:34 AM	Tube furnace set to 0
5/11/2011	10:01:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	10:01:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:01:37 AM	Recipe started at 10:01 AM
5/11/2011	10:01:37 AM	Helium valve closed
5/11/2011	10:01:37 AM	H2 valve closed
5/11/2011	10:01:37 AM	BCl3 valve closed
5/11/2011	10:01:37 AM	PH3 valve closed
5/11/2011	10:01:37 AM	SiCl4 pre valve closed
5/11/2011	10:01:37 AM	SiCl4 post valve closed
5/11/2011	10:01:37 AM	Main Vac valve closed
5/11/2011	10:01:37 AM	Bubbler valve closed
5/11/2011	10:01:37 AM	Bypass valve opened
5/11/2011	10:01:37 AM	Helium MFC set to  0.000000
5/11/2011	10:01:37 AM	H2 MFC set to  0.000000
5/11/2011	10:01:37 AM	BCl3 MFC set to  0.000000
5/11/2011	10:01:37 AM	PHl3 MFC set to  0.000000
5/11/2011	10:01:37 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:01:37 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:01:37 AM	Tube furnace set to 0
5/11/2011	10:01:37 AM	Helium valve closed
5/11/2011	10:01:37 AM	H2 valve closed
5/11/2011	10:01:37 AM	BCl3 valve closed
5/11/2011	10:01:37 AM	PH3 valve closed
5/11/2011	10:01:37 AM	SiCl4 pre valve closed
5/11/2011	10:01:37 AM	SiCl4 post valve closed
5/11/2011	10:01:37 AM	Bubbler valve closed
5/11/2011	10:01:37 AM	Main Vac valve opened
5/11/2011	10:01:37 AM	Bypass valve opened
5/11/2011	10:01:37 AM	Helium MFC set to  0.000000
5/11/2011	10:01:37 AM	H2 MFC set to  0.000000
5/11/2011	10:01:37 AM	BCl3 MFC set to  0.000000
5/11/2011	10:01:37 AM	PHl3 MFC set to  0.000000
5/11/2011	10:01:37 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:01:37 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:01:37 AM	Tube furnace set to 0
5/11/2011	10:01:38 AM	Run finished at 10:01 AM
5/11/2011	10:01:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:01:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2011	10:01:43 AM	Recipe started at 10:01 AM
5/11/2011	10:01:43 AM	H2 valve closed
5/11/2011	10:01:43 AM	BCl3 valve closed
5/11/2011	10:01:43 AM	PH3 valve closed
5/11/2011	10:01:43 AM	SiCl4 pre valve closed
5/11/2011	10:01:43 AM	SiCl4 post valve closed
5/11/2011	10:01:43 AM	Main Vac valve closed
5/11/2011	10:01:43 AM	Bypass valve closed
5/11/2011	10:01:43 AM	Bubbler valve closed
5/11/2011	10:01:43 AM	Helium valve opened
5/11/2011	10:01:43 AM	Helium MFC set to  500.000000
5/11/2011	10:01:43 AM	H2 MFC set to  0.000000
5/11/2011	10:01:43 AM	BCl3 MFC set to  0.000000
5/11/2011	10:01:43 AM	PHl3 MFC set to  0.000000
5/11/2011	10:01:43 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:01:43 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:01:44 AM	Tube furnace set to 0
5/11/2011	10:02:10 AM	Helium valve closed
5/11/2011	10:02:10 AM	H2 valve closed
5/11/2011	10:02:10 AM	BCl3 valve closed
5/11/2011	10:02:10 AM	PH3 valve closed
5/11/2011	10:02:10 AM	SiCl4 pre valve closed
5/11/2011	10:02:10 AM	SiCl4 post valve closed
5/11/2011	10:02:10 AM	Main Vac valve closed
5/11/2011	10:02:10 AM	Bypass valve closed
5/11/2011	10:02:10 AM	Bubbler valve closed
5/11/2011	10:02:10 AM	Helium MFC set to  0.000000
5/11/2011	10:02:10 AM	H2 MFC set to  0.000000
5/11/2011	10:02:10 AM	BCl3 MFC set to  0.000000
5/11/2011	10:02:10 AM	PHl3 MFC set to  0.000000
5/11/2011	10:02:10 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:02:10 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:02:10 AM	Tube furnace set to 0
5/11/2011	10:02:10 AM	Run finished at 10:02 AM
5/11/2011	10:02:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2011	10:05:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2011	10:05:51 AM	Recipe started at 10:05 AM
5/11/2011	10:05:51 AM	H2 valve closed
5/11/2011	10:05:51 AM	BCl3 valve closed
5/11/2011	10:05:51 AM	PH3 valve closed
5/11/2011	10:05:51 AM	SiCl4 pre valve closed
5/11/2011	10:05:51 AM	SiCl4 post valve closed
5/11/2011	10:05:51 AM	Main Vac valve closed
5/11/2011	10:05:51 AM	Bypass valve closed
5/11/2011	10:05:51 AM	Bubbler valve closed
5/11/2011	10:05:51 AM	Helium valve opened
5/11/2011	10:05:51 AM	Helium MFC set to  500.000000
5/11/2011	10:05:51 AM	H2 MFC set to  0.000000
5/11/2011	10:05:51 AM	BCl3 MFC set to  0.000000
5/11/2011	10:05:51 AM	PHl3 MFC set to  0.000000
5/11/2011	10:05:51 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:05:51 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:05:51 AM	Tube furnace set to 0
5/11/2011	10:06:27 AM	Helium valve closed
5/11/2011	10:06:27 AM	H2 valve closed
5/11/2011	10:06:27 AM	BCl3 valve closed
5/11/2011	10:06:27 AM	PH3 valve closed
5/11/2011	10:06:27 AM	SiCl4 pre valve closed
5/11/2011	10:06:27 AM	SiCl4 post valve closed
5/11/2011	10:06:27 AM	Main Vac valve closed
5/11/2011	10:06:27 AM	Bypass valve closed
5/11/2011	10:06:27 AM	Bubbler valve closed
5/11/2011	10:06:27 AM	Helium MFC set to  0.000000
5/11/2011	10:06:27 AM	H2 MFC set to  0.000000
5/11/2011	10:06:27 AM	BCl3 MFC set to  0.000000
5/11/2011	10:06:27 AM	PHl3 MFC set to  0.000000
5/11/2011	10:06:27 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:06:27 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:06:27 AM	Tube furnace set to 0
5/11/2011	10:06:27 AM	Run finished at 10:06 AM
5/11/2011	10:06:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2011	10:06:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:06:32 AM	Recipe started at 10:06 AM
5/11/2011	10:06:32 AM	Helium valve closed
5/11/2011	10:06:32 AM	H2 valve closed
5/11/2011	10:06:32 AM	BCl3 valve closed
5/11/2011	10:06:32 AM	PH3 valve closed
5/11/2011	10:06:32 AM	SiCl4 pre valve closed
5/11/2011	10:06:32 AM	SiCl4 post valve closed
5/11/2011	10:06:32 AM	Main Vac valve closed
5/11/2011	10:06:32 AM	Bubbler valve closed
5/11/2011	10:06:32 AM	Bypass valve opened
5/11/2011	10:06:32 AM	Helium MFC set to  0.000000
5/11/2011	10:06:32 AM	H2 MFC set to  0.000000
5/11/2011	10:06:32 AM	BCl3 MFC set to  0.000000
5/11/2011	10:06:32 AM	PHl3 MFC set to  0.000000
5/11/2011	10:06:32 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:06:32 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:06:32 AM	Tube furnace set to 0
5/11/2011	10:06:32 AM	Helium valve closed
5/11/2011	10:06:32 AM	H2 valve closed
5/11/2011	10:06:32 AM	BCl3 valve closed
5/11/2011	10:06:32 AM	PH3 valve closed
5/11/2011	10:06:32 AM	SiCl4 pre valve closed
5/11/2011	10:06:32 AM	SiCl4 post valve closed
5/11/2011	10:06:32 AM	Bubbler valve closed
5/11/2011	10:06:32 AM	Main Vac valve opened
5/11/2011	10:06:32 AM	Bypass valve opened
5/11/2011	10:06:32 AM	Helium MFC set to  0.000000
5/11/2011	10:06:32 AM	H2 MFC set to  0.000000
5/11/2011	10:06:32 AM	BCl3 MFC set to  0.000000
5/11/2011	10:06:32 AM	PHl3 MFC set to  0.000000
5/11/2011	10:06:32 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:06:32 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:06:33 AM	Tube furnace set to 0
5/11/2011	10:06:33 AM	Run finished at 10:06 AM
5/11/2011	10:06:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:07:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2011	10:07:15 AM	Recipe started at 10:07 AM
5/11/2011	10:07:16 AM	H2 valve closed
5/11/2011	10:07:16 AM	BCl3 valve closed
5/11/2011	10:07:16 AM	PH3 valve closed
5/11/2011	10:07:16 AM	SiCl4 pre valve closed
5/11/2011	10:07:16 AM	SiCl4 post valve closed
5/11/2011	10:07:16 AM	Main Vac valve closed
5/11/2011	10:07:16 AM	Bypass valve closed
5/11/2011	10:07:16 AM	Bubbler valve closed
5/11/2011	10:07:16 AM	Helium valve opened
5/11/2011	10:07:16 AM	Helium MFC set to  500.000000
5/11/2011	10:07:16 AM	H2 MFC set to  0.000000
5/11/2011	10:07:16 AM	BCl3 MFC set to  0.000000
5/11/2011	10:07:16 AM	PHl3 MFC set to  0.000000
5/11/2011	10:07:16 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:07:16 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:07:16 AM	Tube furnace set to 0
5/11/2011	10:07:28 AM	Helium valve closed
5/11/2011	10:07:28 AM	H2 valve closed
5/11/2011	10:07:28 AM	BCl3 valve closed
5/11/2011	10:07:28 AM	PH3 valve closed
5/11/2011	10:07:28 AM	SiCl4 pre valve closed
5/11/2011	10:07:28 AM	SiCl4 post valve closed
5/11/2011	10:07:28 AM	Main Vac valve closed
5/11/2011	10:07:28 AM	Bypass valve closed
5/11/2011	10:07:28 AM	Bubbler valve closed
5/11/2011	10:07:28 AM	Helium MFC set to  0.000000
5/11/2011	10:07:28 AM	H2 MFC set to  0.000000
5/11/2011	10:07:28 AM	BCl3 MFC set to  0.000000
5/11/2011	10:07:28 AM	PHl3 MFC set to  0.000000
5/11/2011	10:07:28 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:07:28 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:07:28 AM	Tube furnace set to 0
5/11/2011	10:07:28 AM	Run finished at 10:07 AM
5/11/2011	10:07:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2011	10:07:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:07:32 AM	Recipe started at 10:07 AM
5/11/2011	10:07:32 AM	Helium valve closed
5/11/2011	10:07:32 AM	H2 valve closed
5/11/2011	10:07:32 AM	BCl3 valve closed
5/11/2011	10:07:32 AM	PH3 valve closed
5/11/2011	10:07:32 AM	SiCl4 pre valve closed
5/11/2011	10:07:32 AM	SiCl4 post valve closed
5/11/2011	10:07:32 AM	Main Vac valve closed
5/11/2011	10:07:32 AM	Bubbler valve closed
5/11/2011	10:07:32 AM	Bypass valve opened
5/11/2011	10:07:32 AM	Helium MFC set to  0.000000
5/11/2011	10:07:32 AM	H2 MFC set to  0.000000
5/11/2011	10:07:32 AM	BCl3 MFC set to  0.000000
5/11/2011	10:07:32 AM	PHl3 MFC set to  0.000000
5/11/2011	10:07:32 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:07:32 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:07:32 AM	Tube furnace set to 0
5/11/2011	10:07:32 AM	Helium valve closed
5/11/2011	10:07:32 AM	H2 valve closed
5/11/2011	10:07:32 AM	BCl3 valve closed
5/11/2011	10:07:32 AM	PH3 valve closed
5/11/2011	10:07:32 AM	SiCl4 pre valve closed
5/11/2011	10:07:32 AM	SiCl4 post valve closed
5/11/2011	10:07:32 AM	Bubbler valve closed
5/11/2011	10:07:32 AM	Main Vac valve opened
5/11/2011	10:07:32 AM	Bypass valve opened
5/11/2011	10:07:32 AM	Helium MFC set to  0.000000
5/11/2011	10:07:32 AM	H2 MFC set to  0.000000
5/11/2011	10:07:32 AM	BCl3 MFC set to  0.000000
5/11/2011	10:07:32 AM	PHl3 MFC set to  0.000000
5/11/2011	10:07:32 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:07:32 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:07:32 AM	Tube furnace set to 0
5/11/2011	10:07:32 AM	Run finished at 10:07 AM
5/11/2011	10:07:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:14:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:14:31 AM	Recipe started at 10:14 AM
5/11/2011	10:14:31 AM	Helium valve closed
5/11/2011	10:14:31 AM	H2 valve closed
5/11/2011	10:14:31 AM	BCl3 valve closed
5/11/2011	10:14:31 AM	PH3 valve closed
5/11/2011	10:14:31 AM	SiCl4 pre valve closed
5/11/2011	10:14:31 AM	SiCl4 post valve closed
5/11/2011	10:14:31 AM	Main Vac valve closed
5/11/2011	10:14:31 AM	Bubbler valve closed
5/11/2011	10:14:31 AM	Bypass valve opened
5/11/2011	10:14:31 AM	Helium MFC set to  0.000000
5/11/2011	10:14:31 AM	H2 MFC set to  0.000000
5/11/2011	10:14:31 AM	BCl3 MFC set to  0.000000
5/11/2011	10:14:31 AM	PHl3 MFC set to  0.000000
5/11/2011	10:14:31 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:14:31 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:14:31 AM	Tube furnace set to 0
5/11/2011	10:14:31 AM	Helium valve closed
5/11/2011	10:14:31 AM	H2 valve closed
5/11/2011	10:14:31 AM	BCl3 valve closed
5/11/2011	10:14:31 AM	PH3 valve closed
5/11/2011	10:14:31 AM	SiCl4 pre valve closed
5/11/2011	10:14:31 AM	SiCl4 post valve closed
5/11/2011	10:14:31 AM	Bubbler valve closed
5/11/2011	10:14:31 AM	Main Vac valve opened
5/11/2011	10:14:31 AM	Bypass valve opened
5/11/2011	10:14:31 AM	Helium MFC set to  0.000000
5/11/2011	10:14:31 AM	H2 MFC set to  0.000000
5/11/2011	10:14:31 AM	BCl3 MFC set to  0.000000
5/11/2011	10:14:31 AM	PHl3 MFC set to  0.000000
5/11/2011	10:14:31 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:14:31 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:14:31 AM	Tube furnace set to 0
5/11/2011	10:14:31 AM	Run finished at 10:14 AM
5/11/2011	10:14:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:39:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	10:39:30 AM	Recipe started at 10:39 AM
5/11/2011	10:39:30 AM	Helium valve closed
5/11/2011	10:39:30 AM	H2 valve closed
5/11/2011	10:39:30 AM	BCl3 valve closed
5/11/2011	10:39:30 AM	PH3 valve closed
5/11/2011	10:39:30 AM	SiCl4 pre valve closed
5/11/2011	10:39:30 AM	SiCl4 post valve closed
5/11/2011	10:39:30 AM	Main Vac valve closed
5/11/2011	10:39:30 AM	Bubbler valve closed
5/11/2011	10:39:30 AM	Bypass valve opened
5/11/2011	10:39:30 AM	Helium MFC set to  0.000000
5/11/2011	10:39:30 AM	H2 MFC set to  0.000000
5/11/2011	10:39:30 AM	BCl3 MFC set to  0.000000
5/11/2011	10:39:30 AM	PHl3 MFC set to  0.000000
5/11/2011	10:39:30 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:39:30 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:39:30 AM	Tube furnace set to 0
5/11/2011	10:39:31 AM	Helium valve closed
5/11/2011	10:39:31 AM	H2 valve closed
5/11/2011	10:39:31 AM	BCl3 valve closed
5/11/2011	10:39:31 AM	PH3 valve closed
5/11/2011	10:39:31 AM	SiCl4 pre valve closed
5/11/2011	10:39:31 AM	SiCl4 post valve closed
5/11/2011	10:39:31 AM	Bubbler valve closed
5/11/2011	10:39:31 AM	Main Vac valve opened
5/11/2011	10:39:31 AM	Bypass valve opened
5/11/2011	10:39:31 AM	Helium MFC set to  0.000000
5/11/2011	10:39:31 AM	H2 MFC set to  0.000000
5/11/2011	10:39:31 AM	BCl3 MFC set to  0.000000
5/11/2011	10:39:31 AM	PHl3 MFC set to  0.000000
5/11/2011	10:39:31 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:39:31 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:39:31 AM	Tube furnace set to 0
5/11/2011	10:39:51 AM	H2 valve closed
5/11/2011	10:39:51 AM	BCl3 valve closed
5/11/2011	10:39:51 AM	PH3 valve closed
5/11/2011	10:39:51 AM	SiCl4 pre valve closed
5/11/2011	10:39:51 AM	SiCl4 post valve closed
5/11/2011	10:39:51 AM	Bubbler valve closed
5/11/2011	10:39:51 AM	Helium valve opened
5/11/2011	10:39:51 AM	Main Vac valve opened
5/11/2011	10:39:51 AM	Bypass valve opened
5/11/2011	10:39:51 AM	Helium MFC set to  100.000000
5/11/2011	10:39:51 AM	H2 MFC set to  0.000000
5/11/2011	10:39:51 AM	BCl3 MFC set to  0.000000
5/11/2011	10:39:51 AM	PHl3 MFC set to  0.000000
5/11/2011	10:39:51 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:39:51 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:39:51 AM	Tube furnace set to 0
5/11/2011	10:40:51 AM	Helium valve closed
5/11/2011	10:40:51 AM	H2 valve closed
5/11/2011	10:40:51 AM	BCl3 valve closed
5/11/2011	10:40:51 AM	PH3 valve closed
5/11/2011	10:40:51 AM	SiCl4 pre valve closed
5/11/2011	10:40:51 AM	SiCl4 post valve closed
5/11/2011	10:40:51 AM	Bubbler valve closed
5/11/2011	10:40:51 AM	Main Vac valve opened
5/11/2011	10:40:51 AM	Bypass valve opened
5/11/2011	10:40:51 AM	Helium MFC set to  0.000000
5/11/2011	10:40:51 AM	H2 MFC set to  0.000000
5/11/2011	10:40:51 AM	BCl3 MFC set to  0.000000
5/11/2011	10:40:51 AM	PHl3 MFC set to  0.000000
5/11/2011	10:40:51 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:40:51 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:40:52 AM	Tube furnace set to 0
5/11/2011	10:41:52 AM	H2 valve closed
5/11/2011	10:41:52 AM	BCl3 valve closed
5/11/2011	10:41:52 AM	PH3 valve closed
5/11/2011	10:41:52 AM	SiCl4 pre valve closed
5/11/2011	10:41:52 AM	SiCl4 post valve closed
5/11/2011	10:41:52 AM	Bubbler valve closed
5/11/2011	10:41:52 AM	Helium valve opened
5/11/2011	10:41:52 AM	Main Vac valve opened
5/11/2011	10:41:52 AM	Bypass valve opened
5/11/2011	10:41:52 AM	Helium MFC set to  100.000000
5/11/2011	10:41:52 AM	H2 MFC set to  0.000000
5/11/2011	10:41:52 AM	BCl3 MFC set to  0.000000
5/11/2011	10:41:52 AM	PHl3 MFC set to  0.000000
5/11/2011	10:41:52 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:41:52 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:41:52 AM	Tube furnace set to 0
5/11/2011	10:42:52 AM	Helium valve closed
5/11/2011	10:42:52 AM	H2 valve closed
5/11/2011	10:42:52 AM	BCl3 valve closed
5/11/2011	10:42:52 AM	PH3 valve closed
5/11/2011	10:42:52 AM	SiCl4 pre valve closed
5/11/2011	10:42:52 AM	SiCl4 post valve closed
5/11/2011	10:42:52 AM	Bubbler valve closed
5/11/2011	10:42:52 AM	Main Vac valve opened
5/11/2011	10:42:52 AM	Bypass valve opened
5/11/2011	10:42:52 AM	Helium MFC set to  0.000000
5/11/2011	10:42:52 AM	H2 MFC set to  0.000000
5/11/2011	10:42:52 AM	BCl3 MFC set to  0.000000
5/11/2011	10:42:52 AM	PHl3 MFC set to  0.000000
5/11/2011	10:42:52 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:42:52 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:42:52 AM	Tube furnace set to 0
5/11/2011	10:43:52 AM	H2 valve closed
5/11/2011	10:43:52 AM	BCl3 valve closed
5/11/2011	10:43:52 AM	PH3 valve closed
5/11/2011	10:43:52 AM	SiCl4 pre valve closed
5/11/2011	10:43:52 AM	SiCl4 post valve closed
5/11/2011	10:43:52 AM	Bubbler valve closed
5/11/2011	10:43:52 AM	Helium valve opened
5/11/2011	10:43:52 AM	Main Vac valve opened
5/11/2011	10:43:52 AM	Bypass valve opened
5/11/2011	10:43:52 AM	Helium MFC set to  100.000000
5/11/2011	10:43:52 AM	H2 MFC set to  0.000000
5/11/2011	10:43:52 AM	BCl3 MFC set to  0.000000
5/11/2011	10:43:52 AM	PHl3 MFC set to  0.000000
5/11/2011	10:43:52 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:43:52 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:43:52 AM	Tube furnace set to 0
5/11/2011	10:44:52 AM	Helium valve closed
5/11/2011	10:44:52 AM	H2 valve closed
5/11/2011	10:44:52 AM	BCl3 valve closed
5/11/2011	10:44:52 AM	PH3 valve closed
5/11/2011	10:44:52 AM	SiCl4 pre valve closed
5/11/2011	10:44:52 AM	SiCl4 post valve closed
5/11/2011	10:44:52 AM	Bubbler valve closed
5/11/2011	10:44:52 AM	Main Vac valve opened
5/11/2011	10:44:52 AM	Bypass valve opened
5/11/2011	10:44:52 AM	Helium MFC set to  0.000000
5/11/2011	10:44:52 AM	H2 MFC set to  0.000000
5/11/2011	10:44:52 AM	BCl3 MFC set to  0.000000
5/11/2011	10:44:52 AM	PHl3 MFC set to  0.000000
5/11/2011	10:44:52 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:44:52 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:44:52 AM	Tube furnace set to 0
5/11/2011	10:45:52 AM	H2 valve closed
5/11/2011	10:45:52 AM	BCl3 valve closed
5/11/2011	10:45:52 AM	PH3 valve closed
5/11/2011	10:45:52 AM	SiCl4 pre valve closed
5/11/2011	10:45:52 AM	SiCl4 post valve closed
5/11/2011	10:45:52 AM	Bubbler valve closed
5/11/2011	10:45:52 AM	Helium valve opened
5/11/2011	10:45:52 AM	Main Vac valve opened
5/11/2011	10:45:52 AM	Bypass valve opened
5/11/2011	10:45:52 AM	Helium MFC set to  100.000000
5/11/2011	10:45:52 AM	H2 MFC set to  0.000000
5/11/2011	10:45:52 AM	BCl3 MFC set to  0.000000
5/11/2011	10:45:52 AM	PHl3 MFC set to  0.000000
5/11/2011	10:45:52 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:45:52 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:45:53 AM	Tube furnace set to 0
5/11/2011	10:46:53 AM	Helium valve closed
5/11/2011	10:46:53 AM	H2 valve closed
5/11/2011	10:46:53 AM	BCl3 valve closed
5/11/2011	10:46:53 AM	PH3 valve closed
5/11/2011	10:46:53 AM	SiCl4 pre valve closed
5/11/2011	10:46:53 AM	SiCl4 post valve closed
5/11/2011	10:46:53 AM	Bubbler valve closed
5/11/2011	10:46:53 AM	Main Vac valve opened
5/11/2011	10:46:53 AM	Bypass valve opened
5/11/2011	10:46:53 AM	Helium MFC set to  0.000000
5/11/2011	10:46:53 AM	H2 MFC set to  0.000000
5/11/2011	10:46:53 AM	BCl3 MFC set to  0.000000
5/11/2011	10:46:53 AM	PHl3 MFC set to  0.000000
5/11/2011	10:46:53 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:46:53 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:46:53 AM	Tube furnace set to 0
5/11/2011	10:47:53 AM	H2 valve closed
5/11/2011	10:47:53 AM	BCl3 valve closed
5/11/2011	10:47:53 AM	PH3 valve closed
5/11/2011	10:47:53 AM	SiCl4 pre valve closed
5/11/2011	10:47:53 AM	SiCl4 post valve closed
5/11/2011	10:47:53 AM	Bubbler valve closed
5/11/2011	10:47:53 AM	Helium valve opened
5/11/2011	10:47:53 AM	Main Vac valve opened
5/11/2011	10:47:53 AM	Bypass valve opened
5/11/2011	10:47:53 AM	Helium MFC set to  100.000000
5/11/2011	10:47:53 AM	H2 MFC set to  0.000000
5/11/2011	10:47:53 AM	BCl3 MFC set to  0.000000
5/11/2011	10:47:53 AM	PHl3 MFC set to  0.000000
5/11/2011	10:47:53 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:47:53 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:47:53 AM	Tube furnace set to 0
5/11/2011	10:48:27 AM	Run aborted at 10:48 AM
5/11/2011	10:48:27 AM	Helium valve closed
5/11/2011	10:48:27 AM	H2 valve closed
5/11/2011	10:48:27 AM	BCl3 valve closed
5/11/2011	10:48:27 AM	PH3 valve closed
5/11/2011	10:48:27 AM	SiCl4 pre valve closed
5/11/2011	10:48:27 AM	SiCl4 post valve closed
5/11/2011	10:48:27 AM	Bypass valve closed
5/11/2011	10:48:27 AM	Main Vac valve closed
5/11/2011	10:48:27 AM	Bubbler valve closed
5/11/2011	10:48:27 AM	Helium MFC set to  0.000000
5/11/2011	10:48:27 AM	H2 MFC set to  0.000000
5/11/2011	10:48:27 AM	BCl3 MFC set to  0.000000
5/11/2011	10:48:27 AM	PHl3 MFC set to  0.000000
5/11/2011	10:48:27 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:48:27 AM	Tube furnace set to 0
5/11/2011	10:48:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	10:48:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	10:48:29 AM	Recipe started at 10:48 AM
5/11/2011	10:48:29 AM	Helium valve closed
5/11/2011	10:48:29 AM	H2 valve closed
5/11/2011	10:48:29 AM	BCl3 valve closed
5/11/2011	10:48:29 AM	PH3 valve closed
5/11/2011	10:48:29 AM	SiCl4 pre valve closed
5/11/2011	10:48:29 AM	SiCl4 post valve closed
5/11/2011	10:48:29 AM	Main Vac valve closed
5/11/2011	10:48:29 AM	Bubbler valve closed
5/11/2011	10:48:29 AM	Bypass valve opened
5/11/2011	10:48:29 AM	Helium MFC set to  0.000000
5/11/2011	10:48:29 AM	H2 MFC set to  0.000000
5/11/2011	10:48:29 AM	BCl3 MFC set to  0.000000
5/11/2011	10:48:29 AM	PHl3 MFC set to  0.000000
5/11/2011	10:48:29 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:48:29 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:48:29 AM	Tube furnace set to 0
5/11/2011	10:48:29 AM	Helium valve closed
5/11/2011	10:48:29 AM	H2 valve closed
5/11/2011	10:48:29 AM	BCl3 valve closed
5/11/2011	10:48:29 AM	PH3 valve closed
5/11/2011	10:48:29 AM	SiCl4 pre valve closed
5/11/2011	10:48:29 AM	SiCl4 post valve closed
5/11/2011	10:48:29 AM	Bubbler valve closed
5/11/2011	10:48:29 AM	Main Vac valve opened
5/11/2011	10:48:29 AM	Bypass valve opened
5/11/2011	10:48:29 AM	Helium MFC set to  0.000000
5/11/2011	10:48:29 AM	H2 MFC set to  0.000000
5/11/2011	10:48:29 AM	BCl3 MFC set to  0.000000
5/11/2011	10:48:29 AM	PHl3 MFC set to  0.000000
5/11/2011	10:48:29 AM	SiCl4 MFC set to  0.000000
5/11/2011	10:48:29 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	10:48:29 AM	Tube furnace set to 0
5/11/2011	10:48:30 AM	Run finished at 10:48 AM
5/11/2011	10:48:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	11:18:19 AM	Recipe started at 11:18 AM
5/11/2011	11:18:19 AM	Helium valve closed
5/11/2011	11:18:19 AM	BCl3 valve closed
5/11/2011	11:18:19 AM	PH3 valve closed
5/11/2011	11:18:19 AM	SiCl4 pre valve closed
5/11/2011	11:18:19 AM	SiCl4 post valve closed
5/11/2011	11:18:19 AM	Main Vac valve closed
5/11/2011	11:18:19 AM	Bypass valve closed
5/11/2011	11:18:19 AM	Bubbler valve closed
5/11/2011	11:18:19 AM	H2 valve opened
5/11/2011	11:18:19 AM	Helium MFC set to  0.000000
5/11/2011	11:18:19 AM	H2 MFC set to  500.000000
5/11/2011	11:18:19 AM	BCl3 MFC set to  0.000000
5/11/2011	11:18:19 AM	PHl3 MFC set to  0.000000
5/11/2011	11:18:19 AM	SiCl4 MFC set to  0.000000
5/11/2011	11:18:19 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	11:18:19 AM	Tube furnace set to 0
5/11/2011	11:19:42 AM	Helium valve closed
5/11/2011	11:19:42 AM	BCl3 valve closed
5/11/2011	11:19:42 AM	PH3 valve closed
5/11/2011	11:19:42 AM	SiCl4 pre valve closed
5/11/2011	11:19:42 AM	SiCl4 post valve closed
5/11/2011	11:19:42 AM	Main Vac valve closed
5/11/2011	11:19:42 AM	Bypass valve closed
5/11/2011	11:19:42 AM	H2 valve opened
5/11/2011	11:19:42 AM	Bubbler valve opened
5/11/2011	11:19:42 AM	Helium MFC set to  0.000000
5/11/2011	11:19:42 AM	H2 MFC set to  500.000000
5/11/2011	11:19:42 AM	BCl3 MFC set to  0.000000
5/11/2011	11:19:42 AM	PHl3 MFC set to  0.000000
5/11/2011	11:19:42 AM	SiCl4 MFC set to  0.000000
5/11/2011	11:19:42 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	11:19:42 AM	Tube furnace set to 1000
5/11/2011	11:39:42 AM	Helium valve closed
5/11/2011	11:39:42 AM	PH3 valve closed
5/11/2011	11:39:42 AM	Main Vac valve closed
5/11/2011	11:39:42 AM	Bypass valve closed
5/11/2011	11:39:42 AM	H2 valve opened
5/11/2011	11:39:42 AM	BCl3 valve opened
5/11/2011	11:39:42 AM	SiCl4 pre valve opened
5/11/2011	11:39:42 AM	SiCl4 post valve opened
5/11/2011	11:39:42 AM	Bubbler valve opened
5/11/2011	11:39:42 AM	Helium MFC set to  0.000000
5/11/2011	11:39:42 AM	H2 MFC set to  500.000000
5/11/2011	11:39:42 AM	BCl3 MFC set to  3.500000
5/11/2011	11:39:42 AM	PHl3 MFC set to  0.000000
5/11/2011	11:39:42 AM	SiCl4 MFC set to  50.000000
5/11/2011	11:39:42 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	11:39:42 AM	Tube furnace set to 1000
5/11/2011	11:49:42 AM	H2 valve closed
5/11/2011	11:49:42 AM	BCl3 valve closed
5/11/2011	11:49:42 AM	PH3 valve closed
5/11/2011	11:49:42 AM	SiCl4 pre valve closed
5/11/2011	11:49:42 AM	SiCl4 post valve closed
5/11/2011	11:49:42 AM	Main Vac valve closed
5/11/2011	11:49:42 AM	Bypass valve closed
5/11/2011	11:49:42 AM	Helium valve opened
5/11/2011	11:49:42 AM	Bubbler valve opened
5/11/2011	11:49:42 AM	Helium MFC set to  500.000000
5/11/2011	11:49:42 AM	H2 MFC set to  0.000000
5/11/2011	11:49:42 AM	BCl3 MFC set to  0.000000
5/11/2011	11:49:42 AM	PHl3 MFC set to  0.000000
5/11/2011	11:49:42 AM	SiCl4 MFC set to  0.000000
5/11/2011	11:49:42 AM	Bypass solenoid MFC set to  0.000000
5/11/2011	11:49:43 AM	Tube furnace set to 0
5/11/2011	12:09:42 PM	Helium valve closed
5/11/2011	12:09:42 PM	H2 valve closed
5/11/2011	12:09:42 PM	BCl3 valve closed
5/11/2011	12:09:42 PM	PH3 valve closed
5/11/2011	12:09:42 PM	SiCl4 pre valve closed
5/11/2011	12:09:42 PM	SiCl4 post valve closed
5/11/2011	12:09:42 PM	Main Vac valve closed
5/11/2011	12:09:42 PM	Bypass valve closed
5/11/2011	12:09:42 PM	Bubbler valve closed
5/11/2011	12:09:42 PM	Helium MFC set to  0.000000
5/11/2011	12:09:43 PM	H2 MFC set to  0.000000
5/11/2011	12:09:43 PM	BCl3 MFC set to  0.000000
5/11/2011	12:09:43 PM	PHl3 MFC set to  0.000000
5/11/2011	12:09:43 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:09:43 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:09:43 PM	Tube furnace set to 0
5/11/2011	12:09:43 PM	Run finished at 12:09 PM
5/11/2011	12:10:44 PM	Helium MFC set to  0.000000
5/11/2011	12:10:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2011	12:10:52 PM	Recipe started at 12:10 PM
5/11/2011	12:10:52 PM	H2 valve closed
5/11/2011	12:10:52 PM	BCl3 valve closed
5/11/2011	12:10:52 PM	PH3 valve closed
5/11/2011	12:10:52 PM	SiCl4 pre valve closed
5/11/2011	12:10:52 PM	SiCl4 post valve closed
5/11/2011	12:10:52 PM	Main Vac valve closed
5/11/2011	12:10:52 PM	Bypass valve closed
5/11/2011	12:10:52 PM	Bubbler valve closed
5/11/2011	12:10:52 PM	Helium valve opened
5/11/2011	12:10:52 PM	Helium MFC set to  500.000000
5/11/2011	12:10:52 PM	H2 MFC set to  0.000000
5/11/2011	12:10:52 PM	BCl3 MFC set to  0.000000
5/11/2011	12:10:52 PM	PHl3 MFC set to  0.000000
5/11/2011	12:10:52 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:10:52 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:10:52 PM	Tube furnace set to 0
5/11/2011	12:10:52 PM	Helium valve closed
5/11/2011	12:10:52 PM	H2 valve closed
5/11/2011	12:10:52 PM	BCl3 valve closed
5/11/2011	12:10:52 PM	PH3 valve closed
5/11/2011	12:10:52 PM	SiCl4 pre valve closed
5/11/2011	12:10:52 PM	SiCl4 post valve closed
5/11/2011	12:10:52 PM	Main Vac valve closed
5/11/2011	12:10:52 PM	Bypass valve closed
5/11/2011	12:10:52 PM	Bubbler valve closed
5/11/2011	12:10:52 PM	Helium MFC set to  0.000000
5/11/2011	12:10:52 PM	H2 MFC set to  0.000000
5/11/2011	12:10:52 PM	BCl3 MFC set to  0.000000
5/11/2011	12:10:52 PM	PHl3 MFC set to  0.000000
5/11/2011	12:10:52 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:10:52 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:10:52 PM	Tube furnace set to 0
5/11/2011	12:10:53 PM	Run finished at 12:10 PM
5/11/2011	12:10:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2011	12:32:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	12:32:15 PM	Recipe started at 12:32 PM
5/11/2011	12:32:15 PM	Helium valve closed
5/11/2011	12:32:15 PM	H2 valve closed
5/11/2011	12:32:15 PM	BCl3 valve closed
5/11/2011	12:32:15 PM	PH3 valve closed
5/11/2011	12:32:15 PM	SiCl4 pre valve closed
5/11/2011	12:32:15 PM	SiCl4 post valve closed
5/11/2011	12:32:15 PM	Main Vac valve closed
5/11/2011	12:32:15 PM	Bubbler valve closed
5/11/2011	12:32:15 PM	Bypass valve opened
5/11/2011	12:32:15 PM	Helium MFC set to  0.000000
5/11/2011	12:32:15 PM	H2 MFC set to  0.000000
5/11/2011	12:32:15 PM	BCl3 MFC set to  0.000000
5/11/2011	12:32:15 PM	PHl3 MFC set to  0.000000
5/11/2011	12:32:15 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:32:15 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:32:15 PM	Tube furnace set to 0
5/11/2011	12:32:49 PM	Helium valve closed
5/11/2011	12:32:49 PM	H2 valve closed
5/11/2011	12:32:49 PM	BCl3 valve closed
5/11/2011	12:32:49 PM	PH3 valve closed
5/11/2011	12:32:49 PM	SiCl4 pre valve closed
5/11/2011	12:32:49 PM	SiCl4 post valve closed
5/11/2011	12:32:49 PM	Bubbler valve closed
5/11/2011	12:32:49 PM	Main Vac valve opened
5/11/2011	12:32:49 PM	Bypass valve opened
5/11/2011	12:32:49 PM	Helium MFC set to  0.000000
5/11/2011	12:32:49 PM	H2 MFC set to  0.000000
5/11/2011	12:32:49 PM	BCl3 MFC set to  0.000000
5/11/2011	12:32:49 PM	PHl3 MFC set to  0.000000
5/11/2011	12:32:49 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:32:49 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:32:49 PM	Tube furnace set to 0
5/11/2011	12:32:49 PM	Run finished at 12:32 PM
5/11/2011	12:32:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2011	12:36:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	12:36:26 PM	Recipe started at 12:36 PM
5/11/2011	12:36:26 PM	Helium valve closed
5/11/2011	12:36:26 PM	H2 valve closed
5/11/2011	12:36:26 PM	BCl3 valve closed
5/11/2011	12:36:26 PM	PH3 valve closed
5/11/2011	12:36:26 PM	SiCl4 pre valve closed
5/11/2011	12:36:26 PM	SiCl4 post valve closed
5/11/2011	12:36:26 PM	Main Vac valve closed
5/11/2011	12:36:26 PM	Bubbler valve closed
5/11/2011	12:36:26 PM	Bypass valve opened
5/11/2011	12:36:26 PM	Helium MFC set to  0.000000
5/11/2011	12:36:27 PM	H2 MFC set to  0.000000
5/11/2011	12:36:27 PM	BCl3 MFC set to  0.000000
5/11/2011	12:36:27 PM	PHl3 MFC set to  0.000000
5/11/2011	12:36:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:36:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:36:27 PM	Tube furnace set to 0
5/11/2011	12:36:27 PM	Helium valve closed
5/11/2011	12:36:27 PM	H2 valve closed
5/11/2011	12:36:27 PM	BCl3 valve closed
5/11/2011	12:36:27 PM	PH3 valve closed
5/11/2011	12:36:27 PM	SiCl4 pre valve closed
5/11/2011	12:36:27 PM	SiCl4 post valve closed
5/11/2011	12:36:27 PM	Bubbler valve closed
5/11/2011	12:36:27 PM	Main Vac valve opened
5/11/2011	12:36:27 PM	Bypass valve opened
5/11/2011	12:36:27 PM	Helium MFC set to  0.000000
5/11/2011	12:36:27 PM	H2 MFC set to  0.000000
5/11/2011	12:36:27 PM	BCl3 MFC set to  0.000000
5/11/2011	12:36:27 PM	PHl3 MFC set to  0.000000
5/11/2011	12:36:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:36:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:36:27 PM	Tube furnace set to 0
5/11/2011	12:37:27 PM	H2 valve closed
5/11/2011	12:37:27 PM	BCl3 valve closed
5/11/2011	12:37:27 PM	PH3 valve closed
5/11/2011	12:37:27 PM	SiCl4 pre valve closed
5/11/2011	12:37:27 PM	SiCl4 post valve closed
5/11/2011	12:37:27 PM	Bubbler valve closed
5/11/2011	12:37:27 PM	Helium valve opened
5/11/2011	12:37:27 PM	Main Vac valve opened
5/11/2011	12:37:27 PM	Bypass valve opened
5/11/2011	12:37:27 PM	Helium MFC set to  100.000000
5/11/2011	12:37:27 PM	H2 MFC set to  0.000000
5/11/2011	12:37:27 PM	BCl3 MFC set to  0.000000
5/11/2011	12:37:27 PM	PHl3 MFC set to  0.000000
5/11/2011	12:37:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:37:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:37:27 PM	Tube furnace set to 0
5/11/2011	12:38:27 PM	Helium valve closed
5/11/2011	12:38:27 PM	H2 valve closed
5/11/2011	12:38:27 PM	BCl3 valve closed
5/11/2011	12:38:27 PM	PH3 valve closed
5/11/2011	12:38:27 PM	SiCl4 pre valve closed
5/11/2011	12:38:27 PM	SiCl4 post valve closed
5/11/2011	12:38:27 PM	Bubbler valve closed
5/11/2011	12:38:27 PM	Main Vac valve opened
5/11/2011	12:38:27 PM	Bypass valve opened
5/11/2011	12:38:27 PM	Helium MFC set to  0.000000
5/11/2011	12:38:27 PM	H2 MFC set to  0.000000
5/11/2011	12:38:27 PM	BCl3 MFC set to  0.000000
5/11/2011	12:38:27 PM	PHl3 MFC set to  0.000000
5/11/2011	12:38:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:38:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:38:28 PM	Tube furnace set to 0
5/11/2011	12:39:28 PM	H2 valve closed
5/11/2011	12:39:28 PM	BCl3 valve closed
5/11/2011	12:39:28 PM	PH3 valve closed
5/11/2011	12:39:28 PM	SiCl4 pre valve closed
5/11/2011	12:39:28 PM	SiCl4 post valve closed
5/11/2011	12:39:28 PM	Bubbler valve closed
5/11/2011	12:39:28 PM	Helium valve opened
5/11/2011	12:39:28 PM	Main Vac valve opened
5/11/2011	12:39:28 PM	Bypass valve opened
5/11/2011	12:39:28 PM	Helium MFC set to  100.000000
5/11/2011	12:39:28 PM	H2 MFC set to  0.000000
5/11/2011	12:39:28 PM	BCl3 MFC set to  0.000000
5/11/2011	12:39:28 PM	PHl3 MFC set to  0.000000
5/11/2011	12:39:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:39:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:39:28 PM	Tube furnace set to 0
5/11/2011	12:40:28 PM	Helium valve closed
5/11/2011	12:40:28 PM	H2 valve closed
5/11/2011	12:40:28 PM	BCl3 valve closed
5/11/2011	12:40:28 PM	PH3 valve closed
5/11/2011	12:40:28 PM	SiCl4 pre valve closed
5/11/2011	12:40:28 PM	SiCl4 post valve closed
5/11/2011	12:40:28 PM	Bubbler valve closed
5/11/2011	12:40:28 PM	Main Vac valve opened
5/11/2011	12:40:28 PM	Bypass valve opened
5/11/2011	12:40:28 PM	Helium MFC set to  0.000000
5/11/2011	12:40:28 PM	H2 MFC set to  0.000000
5/11/2011	12:40:28 PM	BCl3 MFC set to  0.000000
5/11/2011	12:40:28 PM	PHl3 MFC set to  0.000000
5/11/2011	12:40:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:40:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:40:28 PM	Tube furnace set to 0
5/11/2011	12:41:28 PM	H2 valve closed
5/11/2011	12:41:28 PM	BCl3 valve closed
5/11/2011	12:41:28 PM	PH3 valve closed
5/11/2011	12:41:28 PM	SiCl4 pre valve closed
5/11/2011	12:41:28 PM	SiCl4 post valve closed
5/11/2011	12:41:28 PM	Bubbler valve closed
5/11/2011	12:41:28 PM	Helium valve opened
5/11/2011	12:41:28 PM	Main Vac valve opened
5/11/2011	12:41:28 PM	Bypass valve opened
5/11/2011	12:41:28 PM	Helium MFC set to  100.000000
5/11/2011	12:41:28 PM	H2 MFC set to  0.000000
5/11/2011	12:41:28 PM	BCl3 MFC set to  0.000000
5/11/2011	12:41:28 PM	PHl3 MFC set to  0.000000
5/11/2011	12:41:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:41:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:41:28 PM	Tube furnace set to 0
5/11/2011	12:42:28 PM	Helium valve closed
5/11/2011	12:42:28 PM	H2 valve closed
5/11/2011	12:42:28 PM	BCl3 valve closed
5/11/2011	12:42:28 PM	PH3 valve closed
5/11/2011	12:42:28 PM	SiCl4 pre valve closed
5/11/2011	12:42:28 PM	SiCl4 post valve closed
5/11/2011	12:42:28 PM	Bubbler valve closed
5/11/2011	12:42:28 PM	Main Vac valve opened
5/11/2011	12:42:28 PM	Bypass valve opened
5/11/2011	12:42:28 PM	Helium MFC set to  0.000000
5/11/2011	12:42:28 PM	H2 MFC set to  0.000000
5/11/2011	12:42:28 PM	BCl3 MFC set to  0.000000
5/11/2011	12:42:28 PM	PHl3 MFC set to  0.000000
5/11/2011	12:42:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:42:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:42:28 PM	Tube furnace set to 0
5/11/2011	12:43:28 PM	H2 valve closed
5/11/2011	12:43:28 PM	BCl3 valve closed
5/11/2011	12:43:28 PM	PH3 valve closed
5/11/2011	12:43:28 PM	SiCl4 pre valve closed
5/11/2011	12:43:28 PM	SiCl4 post valve closed
5/11/2011	12:43:28 PM	Bubbler valve closed
5/11/2011	12:43:28 PM	Helium valve opened
5/11/2011	12:43:28 PM	Main Vac valve opened
5/11/2011	12:43:28 PM	Bypass valve opened
5/11/2011	12:43:28 PM	Helium MFC set to  100.000000
5/11/2011	12:43:28 PM	H2 MFC set to  0.000000
5/11/2011	12:43:28 PM	BCl3 MFC set to  0.000000
5/11/2011	12:43:28 PM	PHl3 MFC set to  0.000000
5/11/2011	12:43:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:43:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:43:29 PM	Tube furnace set to 0
5/11/2011	12:44:29 PM	Helium valve closed
5/11/2011	12:44:29 PM	H2 valve closed
5/11/2011	12:44:29 PM	BCl3 valve closed
5/11/2011	12:44:29 PM	PH3 valve closed
5/11/2011	12:44:29 PM	SiCl4 pre valve closed
5/11/2011	12:44:29 PM	SiCl4 post valve closed
5/11/2011	12:44:29 PM	Bubbler valve closed
5/11/2011	12:44:29 PM	Main Vac valve opened
5/11/2011	12:44:29 PM	Bypass valve opened
5/11/2011	12:44:29 PM	Helium MFC set to  0.000000
5/11/2011	12:44:29 PM	H2 MFC set to  0.000000
5/11/2011	12:44:29 PM	BCl3 MFC set to  0.000000
5/11/2011	12:44:29 PM	PHl3 MFC set to  0.000000
5/11/2011	12:44:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:44:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:44:29 PM	Tube furnace set to 0
5/11/2011	12:45:29 PM	H2 valve closed
5/11/2011	12:45:29 PM	BCl3 valve closed
5/11/2011	12:45:29 PM	PH3 valve closed
5/11/2011	12:45:29 PM	SiCl4 pre valve closed
5/11/2011	12:45:29 PM	SiCl4 post valve closed
5/11/2011	12:45:29 PM	Bubbler valve closed
5/11/2011	12:45:29 PM	Helium valve opened
5/11/2011	12:45:29 PM	Main Vac valve opened
5/11/2011	12:45:29 PM	Bypass valve opened
5/11/2011	12:45:29 PM	Helium MFC set to  100.000000
5/11/2011	12:45:29 PM	H2 MFC set to  0.000000
5/11/2011	12:45:29 PM	BCl3 MFC set to  0.000000
5/11/2011	12:45:29 PM	PHl3 MFC set to  0.000000
5/11/2011	12:45:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:45:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:45:29 PM	Tube furnace set to 0
5/11/2011	12:46:29 PM	Helium valve closed
5/11/2011	12:46:29 PM	H2 valve closed
5/11/2011	12:46:29 PM	BCl3 valve closed
5/11/2011	12:46:29 PM	PH3 valve closed
5/11/2011	12:46:29 PM	SiCl4 pre valve closed
5/11/2011	12:46:29 PM	SiCl4 post valve closed
5/11/2011	12:46:29 PM	Bubbler valve closed
5/11/2011	12:46:29 PM	Main Vac valve opened
5/11/2011	12:46:29 PM	Bypass valve opened
5/11/2011	12:46:29 PM	Helium MFC set to  0.000000
5/11/2011	12:46:29 PM	H2 MFC set to  0.000000
5/11/2011	12:46:29 PM	BCl3 MFC set to  0.000000
5/11/2011	12:46:29 PM	PHl3 MFC set to  0.000000
5/11/2011	12:46:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:46:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:46:29 PM	Tube furnace set to 0
5/11/2011	12:47:29 PM	H2 valve closed
5/11/2011	12:47:29 PM	BCl3 valve closed
5/11/2011	12:47:29 PM	PH3 valve closed
5/11/2011	12:47:29 PM	SiCl4 pre valve closed
5/11/2011	12:47:29 PM	SiCl4 post valve closed
5/11/2011	12:47:29 PM	Bubbler valve closed
5/11/2011	12:47:29 PM	Helium valve opened
5/11/2011	12:47:29 PM	Main Vac valve opened
5/11/2011	12:47:29 PM	Bypass valve opened
5/11/2011	12:47:29 PM	Helium MFC set to  100.000000
5/11/2011	12:47:29 PM	H2 MFC set to  0.000000
5/11/2011	12:47:29 PM	BCl3 MFC set to  0.000000
5/11/2011	12:47:29 PM	PHl3 MFC set to  0.000000
5/11/2011	12:47:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:47:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:47:29 PM	Tube furnace set to 0
5/11/2011	12:48:29 PM	Helium valve closed
5/11/2011	12:48:29 PM	H2 valve closed
5/11/2011	12:48:29 PM	BCl3 valve closed
5/11/2011	12:48:29 PM	PH3 valve closed
5/11/2011	12:48:29 PM	SiCl4 pre valve closed
5/11/2011	12:48:29 PM	SiCl4 post valve closed
5/11/2011	12:48:29 PM	Bubbler valve closed
5/11/2011	12:48:29 PM	Main Vac valve opened
5/11/2011	12:48:29 PM	Bypass valve opened
5/11/2011	12:48:29 PM	Helium MFC set to  0.000000
5/11/2011	12:48:29 PM	H2 MFC set to  0.000000
5/11/2011	12:48:29 PM	BCl3 MFC set to  0.000000
5/11/2011	12:48:29 PM	PHl3 MFC set to  0.000000
5/11/2011	12:48:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:48:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:48:30 PM	Tube furnace set to 0
5/11/2011	12:49:30 PM	H2 valve closed
5/11/2011	12:49:30 PM	BCl3 valve closed
5/11/2011	12:49:30 PM	PH3 valve closed
5/11/2011	12:49:30 PM	SiCl4 pre valve closed
5/11/2011	12:49:30 PM	SiCl4 post valve closed
5/11/2011	12:49:30 PM	Bubbler valve closed
5/11/2011	12:49:30 PM	Helium valve opened
5/11/2011	12:49:30 PM	Main Vac valve opened
5/11/2011	12:49:30 PM	Bypass valve opened
5/11/2011	12:49:30 PM	Helium MFC set to  100.000000
5/11/2011	12:49:30 PM	H2 MFC set to  0.000000
5/11/2011	12:49:30 PM	BCl3 MFC set to  0.000000
5/11/2011	12:49:30 PM	PHl3 MFC set to  0.000000
5/11/2011	12:49:30 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:49:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:49:30 PM	Tube furnace set to 0
5/11/2011	12:50:30 PM	Helium valve closed
5/11/2011	12:50:30 PM	H2 valve closed
5/11/2011	12:50:30 PM	BCl3 valve closed
5/11/2011	12:50:30 PM	PH3 valve closed
5/11/2011	12:50:30 PM	SiCl4 pre valve closed
5/11/2011	12:50:30 PM	SiCl4 post valve closed
5/11/2011	12:50:30 PM	Bubbler valve closed
5/11/2011	12:50:30 PM	Main Vac valve opened
5/11/2011	12:50:30 PM	Bypass valve opened
5/11/2011	12:50:30 PM	Helium MFC set to  0.000000
5/11/2011	12:50:30 PM	H2 MFC set to  0.000000
5/11/2011	12:50:30 PM	BCl3 MFC set to  0.000000
5/11/2011	12:50:30 PM	PHl3 MFC set to  0.000000
5/11/2011	12:50:30 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:50:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:50:30 PM	Tube furnace set to 0
5/11/2011	12:51:30 PM	H2 valve closed
5/11/2011	12:51:30 PM	BCl3 valve closed
5/11/2011	12:51:30 PM	PH3 valve closed
5/11/2011	12:51:30 PM	SiCl4 pre valve closed
5/11/2011	12:51:30 PM	SiCl4 post valve closed
5/11/2011	12:51:30 PM	Bubbler valve closed
5/11/2011	12:51:30 PM	Helium valve opened
5/11/2011	12:51:30 PM	Main Vac valve opened
5/11/2011	12:51:30 PM	Bypass valve opened
5/11/2011	12:51:30 PM	Helium MFC set to  100.000000
5/11/2011	12:51:30 PM	H2 MFC set to  0.000000
5/11/2011	12:51:30 PM	BCl3 MFC set to  0.000000
5/11/2011	12:51:30 PM	PHl3 MFC set to  0.000000
5/11/2011	12:51:30 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:51:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:51:30 PM	Tube furnace set to 0
5/11/2011	12:52:30 PM	Helium valve closed
5/11/2011	12:52:30 PM	H2 valve closed
5/11/2011	12:52:30 PM	BCl3 valve closed
5/11/2011	12:52:30 PM	PH3 valve closed
5/11/2011	12:52:30 PM	SiCl4 pre valve closed
5/11/2011	12:52:30 PM	SiCl4 post valve closed
5/11/2011	12:52:30 PM	Bubbler valve closed
5/11/2011	12:52:30 PM	Main Vac valve opened
5/11/2011	12:52:30 PM	Bypass valve opened
5/11/2011	12:52:30 PM	Helium MFC set to  0.000000
5/11/2011	12:52:30 PM	H2 MFC set to  0.000000
5/11/2011	12:52:30 PM	BCl3 MFC set to  0.000000
5/11/2011	12:52:30 PM	PHl3 MFC set to  0.000000
5/11/2011	12:52:30 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:52:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:52:30 PM	Tube furnace set to 0
5/11/2011	12:53:30 PM	H2 valve closed
5/11/2011	12:53:30 PM	BCl3 valve closed
5/11/2011	12:53:30 PM	PH3 valve closed
5/11/2011	12:53:30 PM	SiCl4 pre valve closed
5/11/2011	12:53:30 PM	SiCl4 post valve closed
5/11/2011	12:53:30 PM	Bubbler valve closed
5/11/2011	12:53:30 PM	Helium valve opened
5/11/2011	12:53:30 PM	Main Vac valve opened
5/11/2011	12:53:30 PM	Bypass valve opened
5/11/2011	12:53:30 PM	Helium MFC set to  100.000000
5/11/2011	12:53:31 PM	H2 MFC set to  0.000000
5/11/2011	12:53:31 PM	BCl3 MFC set to  0.000000
5/11/2011	12:53:31 PM	PHl3 MFC set to  0.000000
5/11/2011	12:53:31 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:53:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:53:31 PM	Tube furnace set to 0
5/11/2011	12:54:31 PM	Helium valve closed
5/11/2011	12:54:31 PM	H2 valve closed
5/11/2011	12:54:31 PM	BCl3 valve closed
5/11/2011	12:54:31 PM	PH3 valve closed
5/11/2011	12:54:31 PM	SiCl4 pre valve closed
5/11/2011	12:54:31 PM	SiCl4 post valve closed
5/11/2011	12:54:31 PM	Bubbler valve closed
5/11/2011	12:54:31 PM	Main Vac valve opened
5/11/2011	12:54:31 PM	Bypass valve opened
5/11/2011	12:54:31 PM	Helium MFC set to  0.000000
5/11/2011	12:54:31 PM	H2 MFC set to  0.000000
5/11/2011	12:54:31 PM	BCl3 MFC set to  0.000000
5/11/2011	12:54:31 PM	PHl3 MFC set to  0.000000
5/11/2011	12:54:31 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:54:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:54:31 PM	Tube furnace set to 0
5/11/2011	12:55:31 PM	H2 valve closed
5/11/2011	12:55:31 PM	BCl3 valve closed
5/11/2011	12:55:31 PM	PH3 valve closed
5/11/2011	12:55:31 PM	SiCl4 pre valve closed
5/11/2011	12:55:31 PM	SiCl4 post valve closed
5/11/2011	12:55:31 PM	Bubbler valve closed
5/11/2011	12:55:31 PM	Helium valve opened
5/11/2011	12:55:31 PM	Main Vac valve opened
5/11/2011	12:55:31 PM	Bypass valve opened
5/11/2011	12:55:31 PM	Helium MFC set to  100.000000
5/11/2011	12:55:31 PM	H2 MFC set to  0.000000
5/11/2011	12:55:31 PM	BCl3 MFC set to  0.000000
5/11/2011	12:55:31 PM	PHl3 MFC set to  0.000000
5/11/2011	12:55:31 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:55:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:55:31 PM	Tube furnace set to 0
5/11/2011	12:56:31 PM	Helium valve closed
5/11/2011	12:56:31 PM	H2 valve closed
5/11/2011	12:56:31 PM	BCl3 valve closed
5/11/2011	12:56:31 PM	PH3 valve closed
5/11/2011	12:56:31 PM	SiCl4 pre valve closed
5/11/2011	12:56:31 PM	SiCl4 post valve closed
5/11/2011	12:56:31 PM	Bubbler valve closed
5/11/2011	12:56:31 PM	Main Vac valve opened
5/11/2011	12:56:31 PM	Bypass valve opened
5/11/2011	12:56:31 PM	Helium MFC set to  0.000000
5/11/2011	12:56:31 PM	H2 MFC set to  0.000000
5/11/2011	12:56:31 PM	BCl3 MFC set to  0.000000
5/11/2011	12:56:31 PM	PHl3 MFC set to  0.000000
5/11/2011	12:56:31 PM	SiCl4 MFC set to  0.000000
5/11/2011	12:56:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	12:56:31 PM	Tube furnace set to 0
5/11/2011	12:56:32 PM	Run finished at 12:56 PM
5/11/2011	12:56:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	1:59:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	1:59:24 PM	Recipe started at 1:59 PM
5/11/2011	1:59:24 PM	Helium valve closed
5/11/2011	1:59:24 PM	H2 valve closed
5/11/2011	1:59:24 PM	BCl3 valve closed
5/11/2011	1:59:24 PM	PH3 valve closed
5/11/2011	1:59:24 PM	SiCl4 pre valve closed
5/11/2011	1:59:24 PM	SiCl4 post valve closed
5/11/2011	1:59:24 PM	Main Vac valve closed
5/11/2011	1:59:24 PM	Bubbler valve closed
5/11/2011	1:59:24 PM	Bypass valve opened
5/11/2011	1:59:24 PM	Helium MFC set to  0.000000
5/11/2011	1:59:24 PM	H2 MFC set to  0.000000
5/11/2011	1:59:24 PM	BCl3 MFC set to  0.000000
5/11/2011	1:59:24 PM	PHl3 MFC set to  0.000000
5/11/2011	1:59:24 PM	SiCl4 MFC set to  0.000000
5/11/2011	1:59:24 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	1:59:24 PM	Tube furnace set to 0
5/11/2011	1:59:24 PM	Helium valve closed
5/11/2011	1:59:24 PM	H2 valve closed
5/11/2011	1:59:24 PM	BCl3 valve closed
5/11/2011	1:59:24 PM	PH3 valve closed
5/11/2011	1:59:24 PM	SiCl4 pre valve closed
5/11/2011	1:59:24 PM	SiCl4 post valve closed
5/11/2011	1:59:24 PM	Bubbler valve closed
5/11/2011	1:59:24 PM	Main Vac valve opened
5/11/2011	1:59:24 PM	Bypass valve opened
5/11/2011	1:59:24 PM	Helium MFC set to  0.000000
5/11/2011	1:59:24 PM	H2 MFC set to  0.000000
5/11/2011	1:59:24 PM	BCl3 MFC set to  0.000000
5/11/2011	1:59:24 PM	PHl3 MFC set to  0.000000
5/11/2011	1:59:24 PM	SiCl4 MFC set to  0.000000
5/11/2011	1:59:24 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	1:59:25 PM	Tube furnace set to 0
5/11/2011	2:00:25 PM	H2 valve closed
5/11/2011	2:00:25 PM	BCl3 valve closed
5/11/2011	2:00:25 PM	PH3 valve closed
5/11/2011	2:00:25 PM	SiCl4 pre valve closed
5/11/2011	2:00:25 PM	SiCl4 post valve closed
5/11/2011	2:00:25 PM	Bubbler valve closed
5/11/2011	2:00:25 PM	Helium valve opened
5/11/2011	2:00:25 PM	Main Vac valve opened
5/11/2011	2:00:25 PM	Bypass valve opened
5/11/2011	2:00:25 PM	Helium MFC set to  100.000000
5/11/2011	2:00:25 PM	H2 MFC set to  0.000000
5/11/2011	2:00:25 PM	BCl3 MFC set to  0.000000
5/11/2011	2:00:25 PM	PHl3 MFC set to  0.000000
5/11/2011	2:00:25 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:00:25 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:00:25 PM	Tube furnace set to 0
5/11/2011	2:01:25 PM	Helium valve closed
5/11/2011	2:01:25 PM	H2 valve closed
5/11/2011	2:01:25 PM	BCl3 valve closed
5/11/2011	2:01:25 PM	PH3 valve closed
5/11/2011	2:01:25 PM	SiCl4 pre valve closed
5/11/2011	2:01:25 PM	SiCl4 post valve closed
5/11/2011	2:01:25 PM	Bubbler valve closed
5/11/2011	2:01:25 PM	Main Vac valve opened
5/11/2011	2:01:25 PM	Bypass valve opened
5/11/2011	2:01:25 PM	Helium MFC set to  0.000000
5/11/2011	2:01:25 PM	H2 MFC set to  0.000000
5/11/2011	2:01:25 PM	BCl3 MFC set to  0.000000
5/11/2011	2:01:25 PM	PHl3 MFC set to  0.000000
5/11/2011	2:01:25 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:01:25 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:01:25 PM	Tube furnace set to 0
5/11/2011	2:02:25 PM	H2 valve closed
5/11/2011	2:02:25 PM	BCl3 valve closed
5/11/2011	2:02:25 PM	PH3 valve closed
5/11/2011	2:02:25 PM	SiCl4 pre valve closed
5/11/2011	2:02:25 PM	SiCl4 post valve closed
5/11/2011	2:02:25 PM	Bubbler valve closed
5/11/2011	2:02:25 PM	Helium valve opened
5/11/2011	2:02:25 PM	Main Vac valve opened
5/11/2011	2:02:25 PM	Bypass valve opened
5/11/2011	2:02:25 PM	Helium MFC set to  100.000000
5/11/2011	2:02:25 PM	H2 MFC set to  0.000000
5/11/2011	2:02:25 PM	BCl3 MFC set to  0.000000
5/11/2011	2:02:25 PM	PHl3 MFC set to  0.000000
5/11/2011	2:02:25 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:02:25 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:02:25 PM	Tube furnace set to 0
5/11/2011	2:03:25 PM	Helium valve closed
5/11/2011	2:03:25 PM	H2 valve closed
5/11/2011	2:03:25 PM	BCl3 valve closed
5/11/2011	2:03:25 PM	PH3 valve closed
5/11/2011	2:03:25 PM	SiCl4 pre valve closed
5/11/2011	2:03:25 PM	SiCl4 post valve closed
5/11/2011	2:03:25 PM	Bubbler valve closed
5/11/2011	2:03:25 PM	Main Vac valve opened
5/11/2011	2:03:25 PM	Bypass valve opened
5/11/2011	2:03:25 PM	Helium MFC set to  0.000000
5/11/2011	2:03:25 PM	H2 MFC set to  0.000000
5/11/2011	2:03:25 PM	BCl3 MFC set to  0.000000
5/11/2011	2:03:25 PM	PHl3 MFC set to  0.000000
5/11/2011	2:03:25 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:03:25 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:03:25 PM	Tube furnace set to 0
5/11/2011	2:04:25 PM	H2 valve closed
5/11/2011	2:04:25 PM	BCl3 valve closed
5/11/2011	2:04:25 PM	PH3 valve closed
5/11/2011	2:04:25 PM	SiCl4 pre valve closed
5/11/2011	2:04:25 PM	SiCl4 post valve closed
5/11/2011	2:04:25 PM	Bubbler valve closed
5/11/2011	2:04:25 PM	Helium valve opened
5/11/2011	2:04:25 PM	Main Vac valve opened
5/11/2011	2:04:25 PM	Bypass valve opened
5/11/2011	2:04:25 PM	Helium MFC set to  100.000000
5/11/2011	2:04:25 PM	H2 MFC set to  0.000000
5/11/2011	2:04:25 PM	BCl3 MFC set to  0.000000
5/11/2011	2:04:25 PM	PHl3 MFC set to  0.000000
5/11/2011	2:04:25 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:04:25 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:04:26 PM	Tube furnace set to 0
5/11/2011	2:05:26 PM	Helium valve closed
5/11/2011	2:05:26 PM	H2 valve closed
5/11/2011	2:05:26 PM	BCl3 valve closed
5/11/2011	2:05:26 PM	PH3 valve closed
5/11/2011	2:05:26 PM	SiCl4 pre valve closed
5/11/2011	2:05:26 PM	SiCl4 post valve closed
5/11/2011	2:05:26 PM	Bubbler valve closed
5/11/2011	2:05:26 PM	Main Vac valve opened
5/11/2011	2:05:26 PM	Bypass valve opened
5/11/2011	2:05:26 PM	Helium MFC set to  0.000000
5/11/2011	2:05:26 PM	H2 MFC set to  0.000000
5/11/2011	2:05:26 PM	BCl3 MFC set to  0.000000
5/11/2011	2:05:26 PM	PHl3 MFC set to  0.000000
5/11/2011	2:05:26 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:05:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:05:26 PM	Tube furnace set to 0
5/11/2011	2:06:26 PM	H2 valve closed
5/11/2011	2:06:26 PM	BCl3 valve closed
5/11/2011	2:06:26 PM	PH3 valve closed
5/11/2011	2:06:26 PM	SiCl4 pre valve closed
5/11/2011	2:06:26 PM	SiCl4 post valve closed
5/11/2011	2:06:26 PM	Bubbler valve closed
5/11/2011	2:06:26 PM	Helium valve opened
5/11/2011	2:06:26 PM	Main Vac valve opened
5/11/2011	2:06:26 PM	Bypass valve opened
5/11/2011	2:06:26 PM	Helium MFC set to  100.000000
5/11/2011	2:06:26 PM	H2 MFC set to  0.000000
5/11/2011	2:06:26 PM	BCl3 MFC set to  0.000000
5/11/2011	2:06:26 PM	PHl3 MFC set to  0.000000
5/11/2011	2:06:26 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:06:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:06:26 PM	Tube furnace set to 0
5/11/2011	2:07:26 PM	Helium valve closed
5/11/2011	2:07:26 PM	H2 valve closed
5/11/2011	2:07:26 PM	BCl3 valve closed
5/11/2011	2:07:26 PM	PH3 valve closed
5/11/2011	2:07:26 PM	SiCl4 pre valve closed
5/11/2011	2:07:26 PM	SiCl4 post valve closed
5/11/2011	2:07:26 PM	Bubbler valve closed
5/11/2011	2:07:26 PM	Main Vac valve opened
5/11/2011	2:07:26 PM	Bypass valve opened
5/11/2011	2:07:26 PM	Helium MFC set to  0.000000
5/11/2011	2:07:26 PM	H2 MFC set to  0.000000
5/11/2011	2:07:26 PM	BCl3 MFC set to  0.000000
5/11/2011	2:07:26 PM	PHl3 MFC set to  0.000000
5/11/2011	2:07:26 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:07:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:07:26 PM	Tube furnace set to 0
5/11/2011	2:08:26 PM	H2 valve closed
5/11/2011	2:08:26 PM	BCl3 valve closed
5/11/2011	2:08:26 PM	PH3 valve closed
5/11/2011	2:08:26 PM	SiCl4 pre valve closed
5/11/2011	2:08:26 PM	SiCl4 post valve closed
5/11/2011	2:08:26 PM	Bubbler valve closed
5/11/2011	2:08:26 PM	Helium valve opened
5/11/2011	2:08:26 PM	Main Vac valve opened
5/11/2011	2:08:26 PM	Bypass valve opened
5/11/2011	2:08:26 PM	Helium MFC set to  100.000000
5/11/2011	2:08:26 PM	H2 MFC set to  0.000000
5/11/2011	2:08:26 PM	BCl3 MFC set to  0.000000
5/11/2011	2:08:26 PM	PHl3 MFC set to  0.000000
5/11/2011	2:08:26 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:08:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:08:26 PM	Tube furnace set to 0
5/11/2011	2:09:26 PM	Helium valve closed
5/11/2011	2:09:26 PM	H2 valve closed
5/11/2011	2:09:26 PM	BCl3 valve closed
5/11/2011	2:09:26 PM	PH3 valve closed
5/11/2011	2:09:26 PM	SiCl4 pre valve closed
5/11/2011	2:09:26 PM	SiCl4 post valve closed
5/11/2011	2:09:26 PM	Bubbler valve closed
5/11/2011	2:09:26 PM	Main Vac valve opened
5/11/2011	2:09:26 PM	Bypass valve opened
5/11/2011	2:09:26 PM	Helium MFC set to  0.000000
5/11/2011	2:09:26 PM	H2 MFC set to  0.000000
5/11/2011	2:09:26 PM	BCl3 MFC set to  0.000000
5/11/2011	2:09:26 PM	PHl3 MFC set to  0.000000
5/11/2011	2:09:26 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:09:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:09:27 PM	Tube furnace set to 0
5/11/2011	2:10:27 PM	H2 valve closed
5/11/2011	2:10:27 PM	BCl3 valve closed
5/11/2011	2:10:27 PM	PH3 valve closed
5/11/2011	2:10:27 PM	SiCl4 pre valve closed
5/11/2011	2:10:27 PM	SiCl4 post valve closed
5/11/2011	2:10:27 PM	Bubbler valve closed
5/11/2011	2:10:27 PM	Helium valve opened
5/11/2011	2:10:27 PM	Main Vac valve opened
5/11/2011	2:10:27 PM	Bypass valve opened
5/11/2011	2:10:27 PM	Helium MFC set to  100.000000
5/11/2011	2:10:27 PM	H2 MFC set to  0.000000
5/11/2011	2:10:27 PM	BCl3 MFC set to  0.000000
5/11/2011	2:10:27 PM	PHl3 MFC set to  0.000000
5/11/2011	2:10:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:10:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:10:27 PM	Tube furnace set to 0
5/11/2011	2:11:27 PM	Helium valve closed
5/11/2011	2:11:27 PM	H2 valve closed
5/11/2011	2:11:27 PM	BCl3 valve closed
5/11/2011	2:11:27 PM	PH3 valve closed
5/11/2011	2:11:27 PM	SiCl4 pre valve closed
5/11/2011	2:11:27 PM	SiCl4 post valve closed
5/11/2011	2:11:27 PM	Bubbler valve closed
5/11/2011	2:11:27 PM	Main Vac valve opened
5/11/2011	2:11:27 PM	Bypass valve opened
5/11/2011	2:11:27 PM	Helium MFC set to  0.000000
5/11/2011	2:11:27 PM	H2 MFC set to  0.000000
5/11/2011	2:11:27 PM	BCl3 MFC set to  0.000000
5/11/2011	2:11:27 PM	PHl3 MFC set to  0.000000
5/11/2011	2:11:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:11:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:11:27 PM	Tube furnace set to 0
5/11/2011	2:12:27 PM	H2 valve closed
5/11/2011	2:12:27 PM	BCl3 valve closed
5/11/2011	2:12:27 PM	PH3 valve closed
5/11/2011	2:12:27 PM	SiCl4 pre valve closed
5/11/2011	2:12:27 PM	SiCl4 post valve closed
5/11/2011	2:12:27 PM	Bubbler valve closed
5/11/2011	2:12:27 PM	Helium valve opened
5/11/2011	2:12:27 PM	Main Vac valve opened
5/11/2011	2:12:27 PM	Bypass valve opened
5/11/2011	2:12:27 PM	Helium MFC set to  100.000000
5/11/2011	2:12:27 PM	H2 MFC set to  0.000000
5/11/2011	2:12:27 PM	BCl3 MFC set to  0.000000
5/11/2011	2:12:27 PM	PHl3 MFC set to  0.000000
5/11/2011	2:12:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:12:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:12:27 PM	Tube furnace set to 0
5/11/2011	2:13:27 PM	Helium valve closed
5/11/2011	2:13:27 PM	H2 valve closed
5/11/2011	2:13:27 PM	BCl3 valve closed
5/11/2011	2:13:27 PM	PH3 valve closed
5/11/2011	2:13:27 PM	SiCl4 pre valve closed
5/11/2011	2:13:27 PM	SiCl4 post valve closed
5/11/2011	2:13:27 PM	Bubbler valve closed
5/11/2011	2:13:27 PM	Main Vac valve opened
5/11/2011	2:13:27 PM	Bypass valve opened
5/11/2011	2:13:27 PM	Helium MFC set to  0.000000
5/11/2011	2:13:27 PM	H2 MFC set to  0.000000
5/11/2011	2:13:27 PM	BCl3 MFC set to  0.000000
5/11/2011	2:13:27 PM	PHl3 MFC set to  0.000000
5/11/2011	2:13:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:13:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:13:27 PM	Tube furnace set to 0
5/11/2011	2:14:27 PM	H2 valve closed
5/11/2011	2:14:27 PM	BCl3 valve closed
5/11/2011	2:14:27 PM	PH3 valve closed
5/11/2011	2:14:27 PM	SiCl4 pre valve closed
5/11/2011	2:14:27 PM	SiCl4 post valve closed
5/11/2011	2:14:27 PM	Bubbler valve closed
5/11/2011	2:14:27 PM	Helium valve opened
5/11/2011	2:14:27 PM	Main Vac valve opened
5/11/2011	2:14:27 PM	Bypass valve opened
5/11/2011	2:14:27 PM	Helium MFC set to  100.000000
5/11/2011	2:14:27 PM	H2 MFC set to  0.000000
5/11/2011	2:14:27 PM	BCl3 MFC set to  0.000000
5/11/2011	2:14:27 PM	PHl3 MFC set to  0.000000
5/11/2011	2:14:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:14:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:14:28 PM	Tube furnace set to 0
5/11/2011	2:15:28 PM	Helium valve closed
5/11/2011	2:15:28 PM	H2 valve closed
5/11/2011	2:15:28 PM	BCl3 valve closed
5/11/2011	2:15:28 PM	PH3 valve closed
5/11/2011	2:15:28 PM	SiCl4 pre valve closed
5/11/2011	2:15:28 PM	SiCl4 post valve closed
5/11/2011	2:15:28 PM	Bubbler valve closed
5/11/2011	2:15:28 PM	Main Vac valve opened
5/11/2011	2:15:28 PM	Bypass valve opened
5/11/2011	2:15:28 PM	Helium MFC set to  0.000000
5/11/2011	2:15:28 PM	H2 MFC set to  0.000000
5/11/2011	2:15:28 PM	BCl3 MFC set to  0.000000
5/11/2011	2:15:28 PM	PHl3 MFC set to  0.000000
5/11/2011	2:15:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:15:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:15:28 PM	Tube furnace set to 0
5/11/2011	2:16:28 PM	H2 valve closed
5/11/2011	2:16:28 PM	BCl3 valve closed
5/11/2011	2:16:28 PM	PH3 valve closed
5/11/2011	2:16:28 PM	SiCl4 pre valve closed
5/11/2011	2:16:28 PM	SiCl4 post valve closed
5/11/2011	2:16:28 PM	Bubbler valve closed
5/11/2011	2:16:28 PM	Helium valve opened
5/11/2011	2:16:28 PM	Main Vac valve opened
5/11/2011	2:16:28 PM	Bypass valve opened
5/11/2011	2:16:28 PM	Helium MFC set to  100.000000
5/11/2011	2:16:28 PM	H2 MFC set to  0.000000
5/11/2011	2:16:28 PM	BCl3 MFC set to  0.000000
5/11/2011	2:16:28 PM	PHl3 MFC set to  0.000000
5/11/2011	2:16:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:16:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:16:28 PM	Tube furnace set to 0
5/11/2011	2:17:28 PM	Helium valve closed
5/11/2011	2:17:28 PM	H2 valve closed
5/11/2011	2:17:28 PM	BCl3 valve closed
5/11/2011	2:17:28 PM	PH3 valve closed
5/11/2011	2:17:28 PM	SiCl4 pre valve closed
5/11/2011	2:17:28 PM	SiCl4 post valve closed
5/11/2011	2:17:28 PM	Bubbler valve closed
5/11/2011	2:17:28 PM	Main Vac valve opened
5/11/2011	2:17:28 PM	Bypass valve opened
5/11/2011	2:17:28 PM	Helium MFC set to  0.000000
5/11/2011	2:17:28 PM	H2 MFC set to  0.000000
5/11/2011	2:17:28 PM	BCl3 MFC set to  0.000000
5/11/2011	2:17:28 PM	PHl3 MFC set to  0.000000
5/11/2011	2:17:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:17:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:17:28 PM	Tube furnace set to 0
5/11/2011	2:18:28 PM	H2 valve closed
5/11/2011	2:18:28 PM	BCl3 valve closed
5/11/2011	2:18:28 PM	PH3 valve closed
5/11/2011	2:18:28 PM	SiCl4 pre valve closed
5/11/2011	2:18:28 PM	SiCl4 post valve closed
5/11/2011	2:18:28 PM	Bubbler valve closed
5/11/2011	2:18:28 PM	Helium valve opened
5/11/2011	2:18:28 PM	Main Vac valve opened
5/11/2011	2:18:28 PM	Bypass valve opened
5/11/2011	2:18:28 PM	Helium MFC set to  100.000000
5/11/2011	2:18:28 PM	H2 MFC set to  0.000000
5/11/2011	2:18:28 PM	BCl3 MFC set to  0.000000
5/11/2011	2:18:28 PM	PHl3 MFC set to  0.000000
5/11/2011	2:18:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:18:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:18:28 PM	Tube furnace set to 0
5/11/2011	2:19:28 PM	Helium valve closed
5/11/2011	2:19:28 PM	H2 valve closed
5/11/2011	2:19:28 PM	BCl3 valve closed
5/11/2011	2:19:28 PM	PH3 valve closed
5/11/2011	2:19:28 PM	SiCl4 pre valve closed
5/11/2011	2:19:28 PM	SiCl4 post valve closed
5/11/2011	2:19:28 PM	Bubbler valve closed
5/11/2011	2:19:28 PM	Main Vac valve opened
5/11/2011	2:19:28 PM	Bypass valve opened
5/11/2011	2:19:28 PM	Helium MFC set to  0.000000
5/11/2011	2:19:28 PM	H2 MFC set to  0.000000
5/11/2011	2:19:28 PM	BCl3 MFC set to  0.000000
5/11/2011	2:19:28 PM	PHl3 MFC set to  0.000000
5/11/2011	2:19:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	2:19:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	2:19:29 PM	Tube furnace set to 0
5/11/2011	2:19:30 PM	Run finished at 2:19 PM
5/11/2011	2:19:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	3:03:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	3:03:55 PM	Recipe started at 3:03 PM
5/11/2011	3:03:55 PM	Helium valve closed
5/11/2011	3:03:55 PM	H2 valve closed
5/11/2011	3:03:55 PM	BCl3 valve closed
5/11/2011	3:03:55 PM	PH3 valve closed
5/11/2011	3:03:55 PM	SiCl4 pre valve closed
5/11/2011	3:03:55 PM	SiCl4 post valve closed
5/11/2011	3:03:55 PM	Main Vac valve closed
5/11/2011	3:03:55 PM	Bubbler valve closed
5/11/2011	3:03:55 PM	Bypass valve opened
5/11/2011	3:03:55 PM	Helium MFC set to  0.000000
5/11/2011	3:03:55 PM	H2 MFC set to  0.000000
5/11/2011	3:03:55 PM	BCl3 MFC set to  0.000000
5/11/2011	3:03:55 PM	PHl3 MFC set to  0.000000
5/11/2011	3:03:55 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:03:55 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:03:55 PM	Tube furnace set to 0
5/11/2011	3:03:56 PM	Helium valve closed
5/11/2011	3:03:56 PM	H2 valve closed
5/11/2011	3:03:56 PM	BCl3 valve closed
5/11/2011	3:03:56 PM	PH3 valve closed
5/11/2011	3:03:56 PM	SiCl4 pre valve closed
5/11/2011	3:03:56 PM	SiCl4 post valve closed
5/11/2011	3:03:56 PM	Bubbler valve closed
5/11/2011	3:03:56 PM	Main Vac valve opened
5/11/2011	3:03:56 PM	Bypass valve opened
5/11/2011	3:03:56 PM	Helium MFC set to  0.000000
5/11/2011	3:03:56 PM	H2 MFC set to  0.000000
5/11/2011	3:03:56 PM	BCl3 MFC set to  0.000000
5/11/2011	3:03:56 PM	PHl3 MFC set to  0.000000
5/11/2011	3:03:56 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:03:56 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:03:56 PM	Tube furnace set to 0
5/11/2011	3:04:56 PM	H2 valve closed
5/11/2011	3:04:56 PM	BCl3 valve closed
5/11/2011	3:04:56 PM	PH3 valve closed
5/11/2011	3:04:56 PM	SiCl4 pre valve closed
5/11/2011	3:04:56 PM	SiCl4 post valve closed
5/11/2011	3:04:56 PM	Bubbler valve closed
5/11/2011	3:04:56 PM	Helium valve opened
5/11/2011	3:04:56 PM	Main Vac valve opened
5/11/2011	3:04:56 PM	Bypass valve opened
5/11/2011	3:04:56 PM	Helium MFC set to  100.000000
5/11/2011	3:04:56 PM	H2 MFC set to  0.000000
5/11/2011	3:04:56 PM	BCl3 MFC set to  0.000000
5/11/2011	3:04:56 PM	PHl3 MFC set to  0.000000
5/11/2011	3:04:56 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:04:56 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:04:56 PM	Tube furnace set to 0
5/11/2011	3:05:56 PM	Helium valve closed
5/11/2011	3:05:56 PM	H2 valve closed
5/11/2011	3:05:56 PM	BCl3 valve closed
5/11/2011	3:05:56 PM	PH3 valve closed
5/11/2011	3:05:56 PM	SiCl4 pre valve closed
5/11/2011	3:05:56 PM	SiCl4 post valve closed
5/11/2011	3:05:56 PM	Bubbler valve closed
5/11/2011	3:05:56 PM	Main Vac valve opened
5/11/2011	3:05:56 PM	Bypass valve opened
5/11/2011	3:05:56 PM	Helium MFC set to  0.000000
5/11/2011	3:05:56 PM	H2 MFC set to  0.000000
5/11/2011	3:05:56 PM	BCl3 MFC set to  0.000000
5/11/2011	3:05:56 PM	PHl3 MFC set to  0.000000
5/11/2011	3:05:56 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:05:56 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:05:56 PM	Tube furnace set to 0
5/11/2011	3:06:56 PM	H2 valve closed
5/11/2011	3:06:56 PM	BCl3 valve closed
5/11/2011	3:06:56 PM	PH3 valve closed
5/11/2011	3:06:56 PM	SiCl4 pre valve closed
5/11/2011	3:06:56 PM	SiCl4 post valve closed
5/11/2011	3:06:56 PM	Bubbler valve closed
5/11/2011	3:06:56 PM	Helium valve opened
5/11/2011	3:06:56 PM	Main Vac valve opened
5/11/2011	3:06:56 PM	Bypass valve opened
5/11/2011	3:06:56 PM	Helium MFC set to  100.000000
5/11/2011	3:06:56 PM	H2 MFC set to  0.000000
5/11/2011	3:06:56 PM	BCl3 MFC set to  0.000000
5/11/2011	3:06:56 PM	PHl3 MFC set to  0.000000
5/11/2011	3:06:56 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:06:56 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:06:56 PM	Tube furnace set to 0
5/11/2011	3:07:56 PM	Helium valve closed
5/11/2011	3:07:56 PM	H2 valve closed
5/11/2011	3:07:57 PM	BCl3 valve closed
5/11/2011	3:07:57 PM	PH3 valve closed
5/11/2011	3:07:57 PM	SiCl4 pre valve closed
5/11/2011	3:07:57 PM	SiCl4 post valve closed
5/11/2011	3:07:57 PM	Bubbler valve closed
5/11/2011	3:07:57 PM	Main Vac valve opened
5/11/2011	3:07:57 PM	Bypass valve opened
5/11/2011	3:07:57 PM	Helium MFC set to  0.000000
5/11/2011	3:07:57 PM	H2 MFC set to  0.000000
5/11/2011	3:07:57 PM	BCl3 MFC set to  0.000000
5/11/2011	3:07:57 PM	PHl3 MFC set to  0.000000
5/11/2011	3:07:57 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:07:57 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:07:57 PM	Tube furnace set to 0
5/11/2011	3:08:57 PM	H2 valve closed
5/11/2011	3:08:57 PM	BCl3 valve closed
5/11/2011	3:08:57 PM	PH3 valve closed
5/11/2011	3:08:57 PM	SiCl4 pre valve closed
5/11/2011	3:08:57 PM	SiCl4 post valve closed
5/11/2011	3:08:57 PM	Bubbler valve closed
5/11/2011	3:08:57 PM	Helium valve opened
5/11/2011	3:08:57 PM	Main Vac valve opened
5/11/2011	3:08:57 PM	Bypass valve opened
5/11/2011	3:08:57 PM	Helium MFC set to  100.000000
5/11/2011	3:08:57 PM	H2 MFC set to  0.000000
5/11/2011	3:08:57 PM	BCl3 MFC set to  0.000000
5/11/2011	3:08:57 PM	PHl3 MFC set to  0.000000
5/11/2011	3:08:57 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:08:57 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:08:57 PM	Tube furnace set to 0
5/11/2011	3:09:57 PM	Helium valve closed
5/11/2011	3:09:57 PM	H2 valve closed
5/11/2011	3:09:57 PM	BCl3 valve closed
5/11/2011	3:09:57 PM	PH3 valve closed
5/11/2011	3:09:57 PM	SiCl4 pre valve closed
5/11/2011	3:09:57 PM	SiCl4 post valve closed
5/11/2011	3:09:57 PM	Bubbler valve closed
5/11/2011	3:09:57 PM	Main Vac valve opened
5/11/2011	3:09:57 PM	Bypass valve opened
5/11/2011	3:09:57 PM	Helium MFC set to  0.000000
5/11/2011	3:09:57 PM	H2 MFC set to  0.000000
5/11/2011	3:09:57 PM	BCl3 MFC set to  0.000000
5/11/2011	3:09:57 PM	PHl3 MFC set to  0.000000
5/11/2011	3:09:57 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:09:57 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:09:57 PM	Tube furnace set to 0
5/11/2011	3:10:57 PM	H2 valve closed
5/11/2011	3:10:57 PM	BCl3 valve closed
5/11/2011	3:10:57 PM	PH3 valve closed
5/11/2011	3:10:57 PM	SiCl4 pre valve closed
5/11/2011	3:10:57 PM	SiCl4 post valve closed
5/11/2011	3:10:57 PM	Bubbler valve closed
5/11/2011	3:10:57 PM	Helium valve opened
5/11/2011	3:10:57 PM	Main Vac valve opened
5/11/2011	3:10:57 PM	Bypass valve opened
5/11/2011	3:10:57 PM	Helium MFC set to  100.000000
5/11/2011	3:10:57 PM	H2 MFC set to  0.000000
5/11/2011	3:10:57 PM	BCl3 MFC set to  0.000000
5/11/2011	3:10:57 PM	PHl3 MFC set to  0.000000
5/11/2011	3:10:57 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:10:57 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:10:57 PM	Tube furnace set to 0
5/11/2011	3:11:57 PM	Helium valve closed
5/11/2011	3:11:57 PM	H2 valve closed
5/11/2011	3:11:57 PM	BCl3 valve closed
5/11/2011	3:11:57 PM	PH3 valve closed
5/11/2011	3:11:57 PM	SiCl4 pre valve closed
5/11/2011	3:11:57 PM	SiCl4 post valve closed
5/11/2011	3:11:57 PM	Bubbler valve closed
5/11/2011	3:11:57 PM	Main Vac valve opened
5/11/2011	3:11:57 PM	Bypass valve opened
5/11/2011	3:11:57 PM	Helium MFC set to  0.000000
5/11/2011	3:11:57 PM	H2 MFC set to  0.000000
5/11/2011	3:11:57 PM	BCl3 MFC set to  0.000000
5/11/2011	3:11:57 PM	PHl3 MFC set to  0.000000
5/11/2011	3:11:57 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:11:57 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:11:57 PM	Tube furnace set to 0
5/11/2011	3:12:58 PM	H2 valve closed
5/11/2011	3:12:58 PM	BCl3 valve closed
5/11/2011	3:12:58 PM	PH3 valve closed
5/11/2011	3:12:58 PM	SiCl4 pre valve closed
5/11/2011	3:12:58 PM	SiCl4 post valve closed
5/11/2011	3:12:58 PM	Bubbler valve closed
5/11/2011	3:12:58 PM	Helium valve opened
5/11/2011	3:12:58 PM	Main Vac valve opened
5/11/2011	3:12:58 PM	Bypass valve opened
5/11/2011	3:12:58 PM	Helium MFC set to  100.000000
5/11/2011	3:12:58 PM	H2 MFC set to  0.000000
5/11/2011	3:12:58 PM	BCl3 MFC set to  0.000000
5/11/2011	3:12:58 PM	PHl3 MFC set to  0.000000
5/11/2011	3:12:58 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:12:58 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:12:58 PM	Tube furnace set to 0
5/11/2011	3:13:58 PM	Helium valve closed
5/11/2011	3:13:58 PM	H2 valve closed
5/11/2011	3:13:58 PM	BCl3 valve closed
5/11/2011	3:13:58 PM	PH3 valve closed
5/11/2011	3:13:58 PM	SiCl4 pre valve closed
5/11/2011	3:13:58 PM	SiCl4 post valve closed
5/11/2011	3:13:58 PM	Bubbler valve closed
5/11/2011	3:13:58 PM	Main Vac valve opened
5/11/2011	3:13:58 PM	Bypass valve opened
5/11/2011	3:13:58 PM	Helium MFC set to  0.000000
5/11/2011	3:13:58 PM	H2 MFC set to  0.000000
5/11/2011	3:13:58 PM	BCl3 MFC set to  0.000000
5/11/2011	3:13:58 PM	PHl3 MFC set to  0.000000
5/11/2011	3:13:58 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:13:58 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:13:58 PM	Tube furnace set to 0
5/11/2011	3:14:58 PM	H2 valve closed
5/11/2011	3:14:58 PM	BCl3 valve closed
5/11/2011	3:14:58 PM	PH3 valve closed
5/11/2011	3:14:58 PM	SiCl4 pre valve closed
5/11/2011	3:14:58 PM	SiCl4 post valve closed
5/11/2011	3:14:58 PM	Bubbler valve closed
5/11/2011	3:14:58 PM	Helium valve opened
5/11/2011	3:14:58 PM	Main Vac valve opened
5/11/2011	3:14:58 PM	Bypass valve opened
5/11/2011	3:14:58 PM	Helium MFC set to  100.000000
5/11/2011	3:14:58 PM	H2 MFC set to  0.000000
5/11/2011	3:14:58 PM	BCl3 MFC set to  0.000000
5/11/2011	3:14:58 PM	PHl3 MFC set to  0.000000
5/11/2011	3:14:58 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:14:58 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:14:58 PM	Tube furnace set to 0
5/11/2011	3:15:58 PM	Helium valve closed
5/11/2011	3:15:58 PM	H2 valve closed
5/11/2011	3:15:58 PM	BCl3 valve closed
5/11/2011	3:15:58 PM	PH3 valve closed
5/11/2011	3:15:58 PM	SiCl4 pre valve closed
5/11/2011	3:15:58 PM	SiCl4 post valve closed
5/11/2011	3:15:58 PM	Bubbler valve closed
5/11/2011	3:15:58 PM	Main Vac valve opened
5/11/2011	3:15:58 PM	Bypass valve opened
5/11/2011	3:15:58 PM	Helium MFC set to  0.000000
5/11/2011	3:15:58 PM	H2 MFC set to  0.000000
5/11/2011	3:15:58 PM	BCl3 MFC set to  0.000000
5/11/2011	3:15:58 PM	PHl3 MFC set to  0.000000
5/11/2011	3:15:58 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:15:58 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:15:58 PM	Tube furnace set to 0
5/11/2011	3:16:58 PM	H2 valve closed
5/11/2011	3:16:58 PM	BCl3 valve closed
5/11/2011	3:16:58 PM	PH3 valve closed
5/11/2011	3:16:58 PM	SiCl4 pre valve closed
5/11/2011	3:16:58 PM	SiCl4 post valve closed
5/11/2011	3:16:58 PM	Bubbler valve closed
5/11/2011	3:16:58 PM	Helium valve opened
5/11/2011	3:16:58 PM	Main Vac valve opened
5/11/2011	3:16:58 PM	Bypass valve opened
5/11/2011	3:16:58 PM	Helium MFC set to  100.000000
5/11/2011	3:16:58 PM	H2 MFC set to  0.000000
5/11/2011	3:16:58 PM	BCl3 MFC set to  0.000000
5/11/2011	3:16:58 PM	PHl3 MFC set to  0.000000
5/11/2011	3:16:58 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:16:58 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:16:58 PM	Tube furnace set to 0
5/11/2011	3:17:59 PM	Helium valve closed
5/11/2011	3:17:59 PM	H2 valve closed
5/11/2011	3:17:59 PM	BCl3 valve closed
5/11/2011	3:17:59 PM	PH3 valve closed
5/11/2011	3:17:59 PM	SiCl4 pre valve closed
5/11/2011	3:17:59 PM	SiCl4 post valve closed
5/11/2011	3:17:59 PM	Bubbler valve closed
5/11/2011	3:17:59 PM	Main Vac valve opened
5/11/2011	3:17:59 PM	Bypass valve opened
5/11/2011	3:17:59 PM	Helium MFC set to  0.000000
5/11/2011	3:17:59 PM	H2 MFC set to  0.000000
5/11/2011	3:17:59 PM	BCl3 MFC set to  0.000000
5/11/2011	3:17:59 PM	PHl3 MFC set to  0.000000
5/11/2011	3:17:59 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:17:59 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:17:59 PM	Tube furnace set to 0
5/11/2011	3:18:59 PM	H2 valve closed
5/11/2011	3:18:59 PM	BCl3 valve closed
5/11/2011	3:18:59 PM	PH3 valve closed
5/11/2011	3:18:59 PM	SiCl4 pre valve closed
5/11/2011	3:18:59 PM	SiCl4 post valve closed
5/11/2011	3:18:59 PM	Bubbler valve closed
5/11/2011	3:18:59 PM	Helium valve opened
5/11/2011	3:18:59 PM	Main Vac valve opened
5/11/2011	3:18:59 PM	Bypass valve opened
5/11/2011	3:18:59 PM	Helium MFC set to  100.000000
5/11/2011	3:18:59 PM	H2 MFC set to  0.000000
5/11/2011	3:18:59 PM	BCl3 MFC set to  0.000000
5/11/2011	3:18:59 PM	PHl3 MFC set to  0.000000
5/11/2011	3:18:59 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:18:59 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:18:59 PM	Tube furnace set to 0
5/11/2011	3:19:59 PM	Helium valve closed
5/11/2011	3:19:59 PM	H2 valve closed
5/11/2011	3:19:59 PM	BCl3 valve closed
5/11/2011	3:19:59 PM	PH3 valve closed
5/11/2011	3:19:59 PM	SiCl4 pre valve closed
5/11/2011	3:19:59 PM	SiCl4 post valve closed
5/11/2011	3:19:59 PM	Bubbler valve closed
5/11/2011	3:19:59 PM	Main Vac valve opened
5/11/2011	3:19:59 PM	Bypass valve opened
5/11/2011	3:19:59 PM	Helium MFC set to  0.000000
5/11/2011	3:19:59 PM	H2 MFC set to  0.000000
5/11/2011	3:19:59 PM	BCl3 MFC set to  0.000000
5/11/2011	3:19:59 PM	PHl3 MFC set to  0.000000
5/11/2011	3:19:59 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:19:59 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:19:59 PM	Tube furnace set to 0
5/11/2011	3:20:59 PM	H2 valve closed
5/11/2011	3:20:59 PM	BCl3 valve closed
5/11/2011	3:20:59 PM	PH3 valve closed
5/11/2011	3:20:59 PM	SiCl4 pre valve closed
5/11/2011	3:20:59 PM	SiCl4 post valve closed
5/11/2011	3:20:59 PM	Bubbler valve closed
5/11/2011	3:20:59 PM	Helium valve opened
5/11/2011	3:20:59 PM	Main Vac valve opened
5/11/2011	3:20:59 PM	Bypass valve opened
5/11/2011	3:20:59 PM	Helium MFC set to  100.000000
5/11/2011	3:20:59 PM	H2 MFC set to  0.000000
5/11/2011	3:20:59 PM	BCl3 MFC set to  0.000000
5/11/2011	3:20:59 PM	PHl3 MFC set to  0.000000
5/11/2011	3:20:59 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:20:59 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:20:59 PM	Tube furnace set to 0
5/11/2011	3:21:59 PM	Helium valve closed
5/11/2011	3:21:59 PM	H2 valve closed
5/11/2011	3:21:59 PM	BCl3 valve closed
5/11/2011	3:21:59 PM	PH3 valve closed
5/11/2011	3:21:59 PM	SiCl4 pre valve closed
5/11/2011	3:21:59 PM	SiCl4 post valve closed
5/11/2011	3:21:59 PM	Bubbler valve closed
5/11/2011	3:21:59 PM	Main Vac valve opened
5/11/2011	3:21:59 PM	Bypass valve opened
5/11/2011	3:21:59 PM	Helium MFC set to  0.000000
5/11/2011	3:21:59 PM	H2 MFC set to  0.000000
5/11/2011	3:21:59 PM	BCl3 MFC set to  0.000000
5/11/2011	3:21:59 PM	PHl3 MFC set to  0.000000
5/11/2011	3:21:59 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:21:59 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:22:00 PM	Tube furnace set to 0
5/11/2011	3:23:00 PM	H2 valve closed
5/11/2011	3:23:00 PM	BCl3 valve closed
5/11/2011	3:23:00 PM	PH3 valve closed
5/11/2011	3:23:00 PM	SiCl4 pre valve closed
5/11/2011	3:23:00 PM	SiCl4 post valve closed
5/11/2011	3:23:00 PM	Bubbler valve closed
5/11/2011	3:23:00 PM	Helium valve opened
5/11/2011	3:23:00 PM	Main Vac valve opened
5/11/2011	3:23:00 PM	Bypass valve opened
5/11/2011	3:23:00 PM	Helium MFC set to  100.000000
5/11/2011	3:23:00 PM	H2 MFC set to  0.000000
5/11/2011	3:23:00 PM	BCl3 MFC set to  0.000000
5/11/2011	3:23:00 PM	PHl3 MFC set to  0.000000
5/11/2011	3:23:00 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:23:00 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:23:00 PM	Tube furnace set to 0
5/11/2011	3:24:00 PM	Helium valve closed
5/11/2011	3:24:00 PM	H2 valve closed
5/11/2011	3:24:00 PM	BCl3 valve closed
5/11/2011	3:24:00 PM	PH3 valve closed
5/11/2011	3:24:00 PM	SiCl4 pre valve closed
5/11/2011	3:24:00 PM	SiCl4 post valve closed
5/11/2011	3:24:00 PM	Bubbler valve closed
5/11/2011	3:24:00 PM	Main Vac valve opened
5/11/2011	3:24:00 PM	Bypass valve opened
5/11/2011	3:24:00 PM	Helium MFC set to  0.000000
5/11/2011	3:24:00 PM	H2 MFC set to  0.000000
5/11/2011	3:24:00 PM	BCl3 MFC set to  0.000000
5/11/2011	3:24:00 PM	PHl3 MFC set to  0.000000
5/11/2011	3:24:00 PM	SiCl4 MFC set to  0.000000
5/11/2011	3:24:00 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	3:24:00 PM	Tube furnace set to 0
5/11/2011	3:24:01 PM	Run finished at 3:24 PM
5/11/2011	3:24:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	5:12:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/11/2011	5:12:23 PM	Recipe started at 5:12 PM
5/11/2011	5:12:23 PM	Helium valve closed
5/11/2011	5:12:23 PM	H2 valve closed
5/11/2011	5:12:23 PM	BCl3 valve closed
5/11/2011	5:12:23 PM	PH3 valve closed
5/11/2011	5:12:23 PM	SiCl4 pre valve closed
5/11/2011	5:12:23 PM	SiCl4 post valve closed
5/11/2011	5:12:23 PM	Main Vac valve closed
5/11/2011	5:12:23 PM	Bubbler valve closed
5/11/2011	5:12:23 PM	Bypass valve opened
5/11/2011	5:12:23 PM	Helium MFC set to  0.000000
5/11/2011	5:12:23 PM	H2 MFC set to  0.000000
5/11/2011	5:12:23 PM	BCl3 MFC set to  0.000000
5/11/2011	5:12:23 PM	PHl3 MFC set to  0.000000
5/11/2011	5:12:23 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:12:23 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:12:24 PM	Tube furnace set to 0
5/11/2011	5:12:24 PM	Helium valve closed
5/11/2011	5:12:24 PM	H2 valve closed
5/11/2011	5:12:24 PM	BCl3 valve closed
5/11/2011	5:12:24 PM	PH3 valve closed
5/11/2011	5:12:24 PM	SiCl4 pre valve closed
5/11/2011	5:12:24 PM	SiCl4 post valve closed
5/11/2011	5:12:24 PM	Bubbler valve closed
5/11/2011	5:12:24 PM	Main Vac valve opened
5/11/2011	5:12:24 PM	Bypass valve opened
5/11/2011	5:12:24 PM	Helium MFC set to  0.000000
5/11/2011	5:12:24 PM	H2 MFC set to  0.000000
5/11/2011	5:12:24 PM	BCl3 MFC set to  0.000000
5/11/2011	5:12:24 PM	PHl3 MFC set to  0.000000
5/11/2011	5:12:24 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:12:24 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:12:24 PM	Tube furnace set to 0
5/11/2011	5:12:27 PM	H2 valve closed
5/11/2011	5:12:27 PM	BCl3 valve closed
5/11/2011	5:12:27 PM	PH3 valve closed
5/11/2011	5:12:27 PM	SiCl4 pre valve closed
5/11/2011	5:12:27 PM	SiCl4 post valve closed
5/11/2011	5:12:27 PM	Bubbler valve closed
5/11/2011	5:12:27 PM	Helium valve opened
5/11/2011	5:12:27 PM	Main Vac valve opened
5/11/2011	5:12:27 PM	Bypass valve opened
5/11/2011	5:12:27 PM	Helium MFC set to  100.000000
5/11/2011	5:12:27 PM	H2 MFC set to  0.000000
5/11/2011	5:12:27 PM	BCl3 MFC set to  0.000000
5/11/2011	5:12:27 PM	PHl3 MFC set to  0.000000
5/11/2011	5:12:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:12:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:12:27 PM	Tube furnace set to 0
5/11/2011	5:13:27 PM	Helium valve closed
5/11/2011	5:13:27 PM	H2 valve closed
5/11/2011	5:13:27 PM	BCl3 valve closed
5/11/2011	5:13:27 PM	PH3 valve closed
5/11/2011	5:13:27 PM	SiCl4 pre valve closed
5/11/2011	5:13:27 PM	SiCl4 post valve closed
5/11/2011	5:13:27 PM	Bubbler valve closed
5/11/2011	5:13:27 PM	Main Vac valve opened
5/11/2011	5:13:27 PM	Bypass valve opened
5/11/2011	5:13:27 PM	Helium MFC set to  0.000000
5/11/2011	5:13:27 PM	H2 MFC set to  0.000000
5/11/2011	5:13:27 PM	BCl3 MFC set to  0.000000
5/11/2011	5:13:27 PM	PHl3 MFC set to  0.000000
5/11/2011	5:13:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:13:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:13:27 PM	Tube furnace set to 0
5/11/2011	5:14:27 PM	H2 valve closed
5/11/2011	5:14:27 PM	BCl3 valve closed
5/11/2011	5:14:27 PM	PH3 valve closed
5/11/2011	5:14:27 PM	SiCl4 pre valve closed
5/11/2011	5:14:27 PM	SiCl4 post valve closed
5/11/2011	5:14:27 PM	Bubbler valve closed
5/11/2011	5:14:27 PM	Helium valve opened
5/11/2011	5:14:27 PM	Main Vac valve opened
5/11/2011	5:14:27 PM	Bypass valve opened
5/11/2011	5:14:27 PM	Helium MFC set to  100.000000
5/11/2011	5:14:27 PM	H2 MFC set to  0.000000
5/11/2011	5:14:27 PM	BCl3 MFC set to  0.000000
5/11/2011	5:14:27 PM	PHl3 MFC set to  0.000000
5/11/2011	5:14:27 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:14:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:14:28 PM	Tube furnace set to 0
5/11/2011	5:15:28 PM	Helium valve closed
5/11/2011	5:15:28 PM	H2 valve closed
5/11/2011	5:15:28 PM	BCl3 valve closed
5/11/2011	5:15:28 PM	PH3 valve closed
5/11/2011	5:15:28 PM	SiCl4 pre valve closed
5/11/2011	5:15:28 PM	SiCl4 post valve closed
5/11/2011	5:15:28 PM	Bubbler valve closed
5/11/2011	5:15:28 PM	Main Vac valve opened
5/11/2011	5:15:28 PM	Bypass valve opened
5/11/2011	5:15:28 PM	Helium MFC set to  0.000000
5/11/2011	5:15:28 PM	H2 MFC set to  0.000000
5/11/2011	5:15:28 PM	BCl3 MFC set to  0.000000
5/11/2011	5:15:28 PM	PHl3 MFC set to  0.000000
5/11/2011	5:15:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:15:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:15:28 PM	Tube furnace set to 0
5/11/2011	5:16:28 PM	H2 valve closed
5/11/2011	5:16:28 PM	BCl3 valve closed
5/11/2011	5:16:28 PM	PH3 valve closed
5/11/2011	5:16:28 PM	SiCl4 pre valve closed
5/11/2011	5:16:28 PM	SiCl4 post valve closed
5/11/2011	5:16:28 PM	Bubbler valve closed
5/11/2011	5:16:28 PM	Helium valve opened
5/11/2011	5:16:28 PM	Main Vac valve opened
5/11/2011	5:16:28 PM	Bypass valve opened
5/11/2011	5:16:28 PM	Helium MFC set to  100.000000
5/11/2011	5:16:28 PM	H2 MFC set to  0.000000
5/11/2011	5:16:28 PM	BCl3 MFC set to  0.000000
5/11/2011	5:16:28 PM	PHl3 MFC set to  0.000000
5/11/2011	5:16:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:16:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:16:28 PM	Tube furnace set to 0
5/11/2011	5:17:28 PM	Helium valve closed
5/11/2011	5:17:28 PM	H2 valve closed
5/11/2011	5:17:28 PM	BCl3 valve closed
5/11/2011	5:17:28 PM	PH3 valve closed
5/11/2011	5:17:28 PM	SiCl4 pre valve closed
5/11/2011	5:17:28 PM	SiCl4 post valve closed
5/11/2011	5:17:28 PM	Bubbler valve closed
5/11/2011	5:17:28 PM	Main Vac valve opened
5/11/2011	5:17:28 PM	Bypass valve opened
5/11/2011	5:17:28 PM	Helium MFC set to  0.000000
5/11/2011	5:17:28 PM	H2 MFC set to  0.000000
5/11/2011	5:17:28 PM	BCl3 MFC set to  0.000000
5/11/2011	5:17:28 PM	PHl3 MFC set to  0.000000
5/11/2011	5:17:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:17:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:17:28 PM	Tube furnace set to 0
5/11/2011	5:18:28 PM	H2 valve closed
5/11/2011	5:18:28 PM	BCl3 valve closed
5/11/2011	5:18:28 PM	PH3 valve closed
5/11/2011	5:18:28 PM	SiCl4 pre valve closed
5/11/2011	5:18:28 PM	SiCl4 post valve closed
5/11/2011	5:18:28 PM	Bubbler valve closed
5/11/2011	5:18:28 PM	Helium valve opened
5/11/2011	5:18:28 PM	Main Vac valve opened
5/11/2011	5:18:28 PM	Bypass valve opened
5/11/2011	5:18:28 PM	Helium MFC set to  100.000000
5/11/2011	5:18:28 PM	H2 MFC set to  0.000000
5/11/2011	5:18:28 PM	BCl3 MFC set to  0.000000
5/11/2011	5:18:28 PM	PHl3 MFC set to  0.000000
5/11/2011	5:18:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:18:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:18:28 PM	Tube furnace set to 0
5/11/2011	5:19:28 PM	Helium valve closed
5/11/2011	5:19:28 PM	H2 valve closed
5/11/2011	5:19:28 PM	BCl3 valve closed
5/11/2011	5:19:28 PM	PH3 valve closed
5/11/2011	5:19:28 PM	SiCl4 pre valve closed
5/11/2011	5:19:28 PM	SiCl4 post valve closed
5/11/2011	5:19:28 PM	Bubbler valve closed
5/11/2011	5:19:28 PM	Main Vac valve opened
5/11/2011	5:19:28 PM	Bypass valve opened
5/11/2011	5:19:28 PM	Helium MFC set to  0.000000
5/11/2011	5:19:28 PM	H2 MFC set to  0.000000
5/11/2011	5:19:28 PM	BCl3 MFC set to  0.000000
5/11/2011	5:19:28 PM	PHl3 MFC set to  0.000000
5/11/2011	5:19:28 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:19:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:19:29 PM	Tube furnace set to 0
5/11/2011	5:20:29 PM	H2 valve closed
5/11/2011	5:20:29 PM	BCl3 valve closed
5/11/2011	5:20:29 PM	PH3 valve closed
5/11/2011	5:20:29 PM	SiCl4 pre valve closed
5/11/2011	5:20:29 PM	SiCl4 post valve closed
5/11/2011	5:20:29 PM	Bubbler valve closed
5/11/2011	5:20:29 PM	Helium valve opened
5/11/2011	5:20:29 PM	Main Vac valve opened
5/11/2011	5:20:29 PM	Bypass valve opened
5/11/2011	5:20:29 PM	Helium MFC set to  100.000000
5/11/2011	5:20:29 PM	H2 MFC set to  0.000000
5/11/2011	5:20:29 PM	BCl3 MFC set to  0.000000
5/11/2011	5:20:29 PM	PHl3 MFC set to  0.000000
5/11/2011	5:20:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:20:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:20:29 PM	Tube furnace set to 0
5/11/2011	5:21:29 PM	Helium valve closed
5/11/2011	5:21:29 PM	H2 valve closed
5/11/2011	5:21:29 PM	BCl3 valve closed
5/11/2011	5:21:29 PM	PH3 valve closed
5/11/2011	5:21:29 PM	SiCl4 pre valve closed
5/11/2011	5:21:29 PM	SiCl4 post valve closed
5/11/2011	5:21:29 PM	Bubbler valve closed
5/11/2011	5:21:29 PM	Main Vac valve opened
5/11/2011	5:21:29 PM	Bypass valve opened
5/11/2011	5:21:29 PM	Helium MFC set to  0.000000
5/11/2011	5:21:29 PM	H2 MFC set to  0.000000
5/11/2011	5:21:29 PM	BCl3 MFC set to  0.000000
5/11/2011	5:21:29 PM	PHl3 MFC set to  0.000000
5/11/2011	5:21:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:21:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:21:29 PM	Tube furnace set to 0
5/11/2011	5:22:29 PM	H2 valve closed
5/11/2011	5:22:29 PM	BCl3 valve closed
5/11/2011	5:22:29 PM	PH3 valve closed
5/11/2011	5:22:29 PM	SiCl4 pre valve closed
5/11/2011	5:22:29 PM	SiCl4 post valve closed
5/11/2011	5:22:29 PM	Bubbler valve closed
5/11/2011	5:22:29 PM	Helium valve opened
5/11/2011	5:22:29 PM	Main Vac valve opened
5/11/2011	5:22:29 PM	Bypass valve opened
5/11/2011	5:22:29 PM	Helium MFC set to  100.000000
5/11/2011	5:22:29 PM	H2 MFC set to  0.000000
5/11/2011	5:22:29 PM	BCl3 MFC set to  0.000000
5/11/2011	5:22:29 PM	PHl3 MFC set to  0.000000
5/11/2011	5:22:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:22:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:22:29 PM	Tube furnace set to 0
5/11/2011	5:23:29 PM	Helium valve closed
5/11/2011	5:23:29 PM	H2 valve closed
5/11/2011	5:23:29 PM	BCl3 valve closed
5/11/2011	5:23:29 PM	PH3 valve closed
5/11/2011	5:23:29 PM	SiCl4 pre valve closed
5/11/2011	5:23:29 PM	SiCl4 post valve closed
5/11/2011	5:23:29 PM	Bubbler valve closed
5/11/2011	5:23:29 PM	Main Vac valve opened
5/11/2011	5:23:29 PM	Bypass valve opened
5/11/2011	5:23:29 PM	Helium MFC set to  0.000000
5/11/2011	5:23:29 PM	H2 MFC set to  0.000000
5/11/2011	5:23:29 PM	BCl3 MFC set to  0.000000
5/11/2011	5:23:29 PM	PHl3 MFC set to  0.000000
5/11/2011	5:23:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:23:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:23:29 PM	Tube furnace set to 0
5/11/2011	5:24:29 PM	H2 valve closed
5/11/2011	5:24:29 PM	BCl3 valve closed
5/11/2011	5:24:29 PM	PH3 valve closed
5/11/2011	5:24:29 PM	SiCl4 pre valve closed
5/11/2011	5:24:29 PM	SiCl4 post valve closed
5/11/2011	5:24:29 PM	Bubbler valve closed
5/11/2011	5:24:29 PM	Helium valve opened
5/11/2011	5:24:29 PM	Main Vac valve opened
5/11/2011	5:24:29 PM	Bypass valve opened
5/11/2011	5:24:29 PM	Helium MFC set to  100.000000
5/11/2011	5:24:29 PM	H2 MFC set to  0.000000
5/11/2011	5:24:29 PM	BCl3 MFC set to  0.000000
5/11/2011	5:24:29 PM	PHl3 MFC set to  0.000000
5/11/2011	5:24:29 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:24:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:24:30 PM	Tube furnace set to 0
5/11/2011	5:25:30 PM	Helium valve closed
5/11/2011	5:25:30 PM	H2 valve closed
5/11/2011	5:25:30 PM	BCl3 valve closed
5/11/2011	5:25:30 PM	PH3 valve closed
5/11/2011	5:25:30 PM	SiCl4 pre valve closed
5/11/2011	5:25:30 PM	SiCl4 post valve closed
5/11/2011	5:25:30 PM	Bubbler valve closed
5/11/2011	5:25:30 PM	Main Vac valve opened
5/11/2011	5:25:30 PM	Bypass valve opened
5/11/2011	5:25:30 PM	Helium MFC set to  0.000000
5/11/2011	5:25:30 PM	H2 MFC set to  0.000000
5/11/2011	5:25:30 PM	BCl3 MFC set to  0.000000
5/11/2011	5:25:30 PM	PHl3 MFC set to  0.000000
5/11/2011	5:25:30 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:25:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:25:30 PM	Tube furnace set to 0
5/11/2011	5:26:30 PM	H2 valve closed
5/11/2011	5:26:30 PM	BCl3 valve closed
5/11/2011	5:26:30 PM	PH3 valve closed
5/11/2011	5:26:30 PM	SiCl4 pre valve closed
5/11/2011	5:26:30 PM	SiCl4 post valve closed
5/11/2011	5:26:30 PM	Bubbler valve closed
5/11/2011	5:26:30 PM	Helium valve opened
5/11/2011	5:26:30 PM	Main Vac valve opened
5/11/2011	5:26:30 PM	Bypass valve opened
5/11/2011	5:26:30 PM	Helium MFC set to  100.000000
5/11/2011	5:26:30 PM	H2 MFC set to  0.000000
5/11/2011	5:26:30 PM	BCl3 MFC set to  0.000000
5/11/2011	5:26:30 PM	PHl3 MFC set to  0.000000
5/11/2011	5:26:30 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:26:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:26:30 PM	Tube furnace set to 0
5/11/2011	5:27:30 PM	Helium valve closed
5/11/2011	5:27:30 PM	H2 valve closed
5/11/2011	5:27:30 PM	BCl3 valve closed
5/11/2011	5:27:30 PM	PH3 valve closed
5/11/2011	5:27:30 PM	SiCl4 pre valve closed
5/11/2011	5:27:30 PM	SiCl4 post valve closed
5/11/2011	5:27:30 PM	Bubbler valve closed
5/11/2011	5:27:30 PM	Main Vac valve opened
5/11/2011	5:27:30 PM	Bypass valve opened
5/11/2011	5:27:30 PM	Helium MFC set to  0.000000
5/11/2011	5:27:30 PM	H2 MFC set to  0.000000
5/11/2011	5:27:30 PM	BCl3 MFC set to  0.000000
5/11/2011	5:27:30 PM	PHl3 MFC set to  0.000000
5/11/2011	5:27:30 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:27:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:27:30 PM	Tube furnace set to 0
5/11/2011	5:28:30 PM	H2 valve closed
5/11/2011	5:28:30 PM	BCl3 valve closed
5/11/2011	5:28:30 PM	PH3 valve closed
5/11/2011	5:28:30 PM	SiCl4 pre valve closed
5/11/2011	5:28:30 PM	SiCl4 post valve closed
5/11/2011	5:28:30 PM	Bubbler valve closed
5/11/2011	5:28:30 PM	Helium valve opened
5/11/2011	5:28:30 PM	Main Vac valve opened
5/11/2011	5:28:30 PM	Bypass valve opened
5/11/2011	5:28:30 PM	Helium MFC set to  100.000000
5/11/2011	5:28:30 PM	H2 MFC set to  0.000000
5/11/2011	5:28:30 PM	BCl3 MFC set to  0.000000
5/11/2011	5:28:30 PM	PHl3 MFC set to  0.000000
5/11/2011	5:28:30 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:28:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:28:30 PM	Tube furnace set to 0
5/11/2011	5:29:30 PM	Helium valve closed
5/11/2011	5:29:30 PM	H2 valve closed
5/11/2011	5:29:30 PM	BCl3 valve closed
5/11/2011	5:29:30 PM	PH3 valve closed
5/11/2011	5:29:30 PM	SiCl4 pre valve closed
5/11/2011	5:29:30 PM	SiCl4 post valve closed
5/11/2011	5:29:30 PM	Bubbler valve closed
5/11/2011	5:29:30 PM	Main Vac valve opened
5/11/2011	5:29:31 PM	Bypass valve opened
5/11/2011	5:29:31 PM	Helium MFC set to  0.000000
5/11/2011	5:29:31 PM	H2 MFC set to  0.000000
5/11/2011	5:29:31 PM	BCl3 MFC set to  0.000000
5/11/2011	5:29:31 PM	PHl3 MFC set to  0.000000
5/11/2011	5:29:31 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:29:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:29:31 PM	Tube furnace set to 0
5/11/2011	5:30:31 PM	H2 valve closed
5/11/2011	5:30:31 PM	BCl3 valve closed
5/11/2011	5:30:31 PM	PH3 valve closed
5/11/2011	5:30:31 PM	SiCl4 pre valve closed
5/11/2011	5:30:31 PM	SiCl4 post valve closed
5/11/2011	5:30:31 PM	Bubbler valve closed
5/11/2011	5:30:31 PM	Helium valve opened
5/11/2011	5:30:31 PM	Main Vac valve opened
5/11/2011	5:30:31 PM	Bypass valve opened
5/11/2011	5:30:31 PM	Helium MFC set to  100.000000
5/11/2011	5:30:31 PM	H2 MFC set to  0.000000
5/11/2011	5:30:31 PM	BCl3 MFC set to  0.000000
5/11/2011	5:30:31 PM	PHl3 MFC set to  0.000000
5/11/2011	5:30:31 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:30:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:30:31 PM	Tube furnace set to 0
5/11/2011	5:31:31 PM	Helium valve closed
5/11/2011	5:31:31 PM	H2 valve closed
5/11/2011	5:31:31 PM	BCl3 valve closed
5/11/2011	5:31:31 PM	PH3 valve closed
5/11/2011	5:31:31 PM	SiCl4 pre valve closed
5/11/2011	5:31:31 PM	SiCl4 post valve closed
5/11/2011	5:31:31 PM	Bubbler valve closed
5/11/2011	5:31:31 PM	Main Vac valve opened
5/11/2011	5:31:31 PM	Bypass valve opened
5/11/2011	5:31:31 PM	Helium MFC set to  0.000000
5/11/2011	5:31:31 PM	H2 MFC set to  0.000000
5/11/2011	5:31:31 PM	BCl3 MFC set to  0.000000
5/11/2011	5:31:31 PM	PHl3 MFC set to  0.000000
5/11/2011	5:31:31 PM	SiCl4 MFC set to  0.000000
5/11/2011	5:31:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2011	5:31:31 PM	Tube furnace set to 0
5/11/2011	5:31:32 PM	Run finished at 5:31 PM
5/11/2011	5:31:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
